Pressure sensor for preventing fluid jetting

    公开(公告)号:US11662263B2

    公开(公告)日:2023-05-30

    申请号:US17217254

    申请日:2021-03-30

    CPC classification number: G01L9/0052 G01L19/0038 G01L19/06

    Abstract: A pressure sensor includes a housing, an isolator positioned at a first end of the housing, and a first cavity formed between the first end of the housing and the isolator. The pressure sensor further includes a second cavity formed in the housing and a channel with a first end fluidly connected to the first cavity and a second end fluidly coupled to the second cavity. A pressure sensor chip is positioned in the second cavity and includes a first diaphragm positioned at a top side of the pressure sensor chip laterally outwards from the second end of the channel to prevent a fluid from jetting onto the first diaphragm.

    PRESSURE SENSOR
    2.
    发明申请

    公开(公告)号:US20220316971A1

    公开(公告)日:2022-10-06

    申请号:US17217254

    申请日:2021-03-30

    Abstract: A pressure sensor includes a housing, an isolator positioned at a first end of the housing, and a first cavity formed between the first end of the housing and the isolator. The pressure sensor further includes a second cavity formed in the housing and a channel with a first end fluidly connected to the first cavity and a second end fluidly coupled to the second cavity. A pressure sensor chip is positioned in the second cavity and includes a first diaphragm positioned at a top side of the pressure sensor chip laterally outwards from the second end of the channel.

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