Device and Method for Adapting Measuring Range and Sensitivity of Micromechanical Sensors

    公开(公告)号:US20240400379A1

    公开(公告)日:2024-12-05

    申请号:US18680386

    申请日:2024-05-31

    Abstract: A measuring system based on micromechanical elements, including an energy converter which is configured to convert a physical signal into a displacement of the energy converter, a force generator which is configured to convert the displacement from the energy converter into a force on a movably mounted slider, and an electrostatic actuator which is mechanically connected to the slider and/or an electrostatic anti-spring which is mechanically connected to the slider, and an electromechanical signal converter which converts a displacement of the slider into an electrical signal, the electrostatic actuator being configured to convert the displacement from the energy converter into a force on a movably mounted slider, which is mechanically connected to the slider, and an electromechanical signal converter which converts a displacement of the slider into an electrical signal, wherein the electrostatic actuator is configured to set an offset compensation of the measuring system via a control voltage and/or the electrostatic anti-spring is configured to set a sensitivity of the measuring system via a control voltage.

    Passive micromechanical counter
    2.
    发明授权

    公开(公告)号:US12008432B2

    公开(公告)日:2024-06-11

    申请号:US17636942

    申请日:2020-08-20

    CPC classification number: G06M1/108 B81B3/0064 B81B2201/0292 B81B2203/04

    Abstract: A passive micromechanical counter for counting and storing a number of mechanical pulses includes at least one memory cell, the memory cell having a cell input, a latching mechanism and an electromechanical coding unit, the cell input being designed to mechanically transmit the mechanical pulse to the latching mechanism, and the latching mechanism being designed to store the number of mechanical pulses transmitted by means of its discrete latching position. It is provided that an electrical digital signal can be generated by applying an electrical voltage to the electromechanical coding unit, the electrical digital signal representing the discrete latching position of the latching mechanism.

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