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公开(公告)号:US20180197988A1
公开(公告)日:2018-07-12
申请号:US15400244
申请日:2017-01-06
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Perumal RATNAM , Christopher PETTI , Juan SAENZ , Guangle ZHOU , Abhijit BANDYOPADHYAY , Tanmay KUMAR
IPC: H01L29/78 , H01L29/423 , H01L23/528 , H01L27/24 , H01L29/66
CPC classification number: H01L29/7827 , H01L23/5283 , H01L27/2454 , H01L29/42364 , H01L29/42376 , H01L29/66666 , H01L29/78642 , H01L29/78648
Abstract: A matrix rail structure is formed over a substrate. The matrix rail structure includes a pair of lengthwise sidewalls that extend along a first horizontal direction and comprises, or is at least partially subsequently replaced with, a set of at least one gate electrode rail extending along the first horizontal direction and straight-sidewalled gate dielectrics. A pair of vertical semiconductor channel strips and a pair of laterally-undulating gate dielectrics can be formed on sidewalls of the matrix rail structure for each vertical field effect transistor. At least one laterally-undulating gate electrode extending along the first horizontal direction is formed on the laterally-undulating gate dielectrics. Bottom active regions and top active regions are formed at end portions of the vertical semiconductor channel strips. The vertical field effect transistors can be formed as a two-dimensional array, and may be employed as access transistors for a three-dimensional memory device.
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公开(公告)号:US20190097132A1
公开(公告)日:2019-03-28
申请号:US15714246
申请日:2017-09-25
Applicant: SANDISK TECHNOLOGIES LLC
Inventor: Bijesh RAJAMOHANAN , Juan SAENZ
IPC: H01L45/00 , H01L27/112 , H01L29/10
Abstract: A method of operating a resistive memory device includes providing a resistive memory device including an array of resistive memory cells, where each of the resistive memory cells includes a resistive memory material having at least two different resistive states, performing a first mode read operation on a group of resistive memory cells within the array, determining a bit error rate for data generated by the first mode read operation, determining whether the determined bit error rate is below a predetermined limit, and performing a second mode read operation on the group of resistive memory cells within the array based on a threshold voltage if the determined bit error rate is above the predetermined limit.
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