公开(公告)号：US20160282609A1

公开(公告)日：2016-09-29

申请号：US15040725

申请日：2016-02-10

Applicant: SEIKO EPSON CORPORATION

Inventor： Terunao HANAOKA ,  Shuhei YAMADA

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G02B26/0841

Abstract: In an electro-optical device, a mirror that is formed on an element substrate is sealed by a frame shaped spacer and a plate-like light-transmitting cover which is adhered to the spacer. An inorganic barrier layer is formed on an outer face of the spacer and a side face of the light-transmitting cover, and the boundary of the spacer and the light-transmitting cover is covered by the inorganic barrier layer.

Abstract translation: 在电光装置中，形成在元件基板上的反射镜由框状的间隔件和粘贴在间隔件上的板状透光罩密封。 在隔离物的外表面和透光罩的侧面上形成无机阻挡层，间隔物和透光罩的边界被无机阻挡层覆盖。

公开(公告)号：US20170315344A1

公开(公告)日：2017-11-02

申请号：US15651659

申请日：2017-07-17

Applicant: SEIKO EPSON CORPORATION

Inventor： Terunao HANAOKA ,  Shuhei YAMADA

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G02B26/0841

Abstract: In an electro-optical device, a mirror that is formed on an element substrate is sealed by a frame shaped spacer and a plate-like light-transmitting cover which is adhered to the spacer. An inorganic barrier layer is formed on an outer face of the spacer and a side face of the light-transmitting cover, and the boundary of the spacer and the light-transmitting cover is covered by the inorganic barrier layer.