Tunable optical filter device
    2.
    发明授权

    公开(公告)号:US12235563B2

    公开(公告)日:2025-02-25

    申请号:US17779669

    申请日:2019-09-25

    Inventor: Bin Guo

    Abstract: A tunable optical filter device. The device comprises a first substrate (101) provided with a first reflective structure (106) and a thin film (103) provided with a second reflective structure (107), the outer peripheries of the surfaces of the first substrate (101) and the thin film (103) having the reflective structures are mutually bonded by means of bonding compounds (102) so as to form a cavity between the reflective structures, and a piezoelectric thin film structure (108) is provided on a surface of the thin film (103) at the cavity side. The tunable optical filter device can avoid a pull-in effect caused by capacitor driving, thereby improving the movable range of the thin film (103), and correspondingly expanding the tunable range of the spectrum of the Fabry-Perot cavity; in addition, the tunable optical filter device can be applied to a device with a limited size, such as a micro spectrometer, a miniaturized or even a mini-hyperspectral camera or a mobile phone.

    Tuneable Fabry-Perot cavity self-calibration method and spectrum acquisition device with a self-calibration function

    公开(公告)号:US11879781B2

    公开(公告)日:2024-01-23

    申请号:US17425643

    申请日:2019-11-19

    Inventor: Bin Guo

    CPC classification number: G01J3/45 G01J3/2823 G01J2003/2879

    Abstract: A filter is irradiated with incident light, and calibrated light with a fixed wavelength is obtained after the incident light is transmitted through a calibration filter film on the filter; the calibrated light is selected and transmitted via the Fabry-Perot cavity, and selected light is obtained after the calibrated light is transmitted through the Fabry-Perot cavity; an image chip is irradiated with the selected light for imaging, and an output signal is obtained. When the selected wavelength of the tuneable Fabry-Perot cavity matches the wavelength of the calibrated light transmitted by the calibration filter film at a certain position, light at the position is selected and reaches the imaging chip, and the output signal of the imaging chip at the corresponding position can be used as a detection signal for self-calibration, which does not affect normal imaging at other positions on the filter besides the calibration filter film.

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