公开(公告)号：US20170263412A1

公开(公告)日：2017-09-14

申请号：US15427057

申请日：2017-02-08

Applicant: SHIMADZU CORPORATION

Inventor： HIROKI MAEDA

IPC: H01J35/08

CPC classification number: H01J35/18 ,  H01J35/186 ,  H01J2235/081 ,  H01J2235/122

Abstract: An X-ray target and an X-ray generation device including the X-ray target are provided. In an X-ray target, a frame for supporting an irradiation window is divided into a first frame closer to the irradiation window and a second frame on the outer side of the first frame. The irradiation window is formed of a diamond plate having a thermal expansion coefficient of 1×10−6/K. The first frame is formed of Mo (molybdenum) having a thermal expansion coefficient of 4.8×10−6/K or W (tungsten) having a thermal expansion coefficient of 4.3×10−6/K. The second frame is formed of Cu (copper) having a thermal expansion coefficient of 16.5×10−6/K. A difference between the thermal expansion coefficients of the irradiation window and the first frame is less than a difference between the thermal expansion coefficients of the irradiation window and the second frame.