公开(公告)号：US20200083190A1

公开(公告)日：2020-03-12

申请号：US16615816

申请日：2018-05-24

Applicant: SHINKAWA LTD. ,  TOHOKU UNIVERSITY

Inventor： Yuji EGUCHI ,  Kohei SEYAMA ,  Tomonori NAKAMURA ,  Hiroshi KIKUCHI ,  Takehito SHIMATSU ,  Miyuki UOMOTO

IPC: H01L23/00

Abstract: This method for producing a structure wherein base materials are bonded by atomic diffusion comprises: a step for applying a liquid resin on the base material; a step for smoothing the surface of the liquid resin by surface tension; a step for forming a resin layer by curing; a step for forming a metal thin film on the resin layer; a step for forming a metal thin film on the base material; and a step for bringing the metal thin film of the base material and the metal thin film of the base material into close contact with each other, thereby bonding the metal thin film of the resin layer and the metal thin film of the base material with each other by atomic diffusion

公开(公告)号：US20220216089A1

公开(公告)日：2022-07-07

申请号：US17603934

申请日：2020-04-13

Applicant: SHINKAWA LTD.

Inventor： JIN LI ,  Hiroshi KIKUCHI ,  Satoshi ENOKIDO

IPC: H01L21/683 ,  H01L21/677

Abstract: This conveying device 1 comprises: a chuck 2 that contactlessly holds a semiconductor chip 103 to face a holding surface 2B; and a guide 3 that has a guide probe 9 capable of abutting a chip side surface 103s of the semiconductor chip 103, and, for the semiconductor chip 103 held by the chuck 2, the guide probe 9 limits the movement of the semiconductor chip 103 in the lateral direction which intersects a normal N to the holding surface 2B. The guide probe 9 is capable of reciprocating movement in which a probe tip 9a moves towards and away from the holding surface 2B.

公开(公告)号：US20240175941A1

公开(公告)日：2024-05-30

申请号：US18016354

申请日：2021-07-28

Applicant: SHINKAWA LTD.

Inventor： Hiroshi KIKUCHI ,  Shinsuke FUKUMOTO

IPC: G01R31/58

CPC classification number: G01R31/58

Abstract: An electric circuit abnormality detection device includes a pulse generator, a directional coupler, and a detection unit. The detection unit includes a reference reflected wave database and a calculation part. The reference reflected wave database stores waveform information of a reference reflected wave inputted from the directional coupler when a pulse signal is inputted to a reference electric circuit that has a same wiring pattern as a pulse heater and does not have an abnormality. The calculation part detects an abnormality in the pulse heater by comparing waveform information of a reflected wave inputted from the directional coupler when the pulse signal is inputted to the pulse heater, with waveform information of the reference reflected wave stored in the reference reflected wave database.