METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

    公开(公告)号:US20230130929A1

    公开(公告)日:2023-04-27

    申请号:US17707654

    申请日:2022-03-29

    Applicant: SK hynix Inc.

    Abstract: A method of manufacturing a semiconductor device includes forming a first through via surrounded by a liner in a first semiconductor substrate, first-recessing the semiconductor substrate to expose a first portion of the liner covering an end portion of the first through via, and forming a first diffusion barrier layer covering the first-recessed first semiconductor substrate and exposing a second portion of the liner. The method also includes removing the second portion of the liner and second-recessing the first diffusion barrier layer. The method further includes forming a second diffusion barrier layer that covers the second-recessed first diffusion barrier layer and a top portion of the liner from which the second portion is removed and exposes a top surface of the end portion of the first through via.

    SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

    公开(公告)号:US20220102193A1

    公开(公告)日:2022-03-31

    申请号:US17152390

    申请日:2021-01-19

    Applicant: SK hynix Inc.

    Inventor: Jin Woong KIM

    Abstract: A semiconductor device including: a trench defining an active region in a substrate; a first semiconductor liner formed over the trench; a second semiconductor liner formed over the first semiconductor liner; and a device isolation layer formed over the second semiconductor liner and filling the trench. Disclosed is also a method for fabricating a semiconductor device, the method including: forming a trench defining an active region in a substrate; forming a plurality of semiconductor liners over the trench; performing pretreatment before forming each of the semiconductor liners; and performing post-treatment after forming each of the semiconductor liners.

    DATA STORAGE DEVICE AND OPERATING METHOD THEREOF

    公开(公告)号:US20190189193A1

    公开(公告)日:2019-06-20

    申请号:US16032492

    申请日:2018-07-11

    Applicant: SK hynix Inc.

    Abstract: A data storage device includes a nonvolatile memory device including a plurality of memory blocks; and a device controller configured to control the nonvolatile memory device such that, when a first refresh scan command is received from a host device, a first refresh scan operation for the plurality of memory blocks is performed and then a first refresh scan result for the first refresh scan operation is transmitted to the host device, and when a first refresh operation command is received from the host device, a first refresh operation for the nonvolatile memory device is performed.

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