公开(公告)号：US09696144B2

公开(公告)日：2017-07-04

申请号：US14777653

申请日：2014-03-17

Applicant: SNU Precision Co., Ltd.

Inventor： Tae Yong Jo ,  Young Min Hwang ,  Seong Ryong Kim ,  Sang Soo Kang ,  Heui Jae Pahk

IPC: G01B11/24 ,  G01B9/02 ,  G01N21/88 ,  G01N21/95 ,  G01J3/50 ,  G01J3/02

CPC classification number: G01B11/2441 ,  G01B9/02029 ,  G01B9/02034 ,  G01B9/02057 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/50 ,  G01J3/506 ,  G01N21/8806 ,  G01N21/95 ,  G01N2021/8845 ,  G01N2021/9513

Abstract: Provided herein is a three-dimensional shape measurement apparatus capable of measuring a shape of a measurement object using an interferometer and color information of the measurement object, the apparatus including a light source for emitting a light; a light divider for reflecting the light emitted from the light source or transmitting a light reflected by the measurement object; a lens unit for focusing the light reflected by the light divider onto the measurement object; a light detector for detecting the light reflected from the measurement object; and a light adjuster arranged on a light path between the light source and the light divider, and configured to interrupt the light being emitted from a central area of the light source to reduce interference of light occurring in the lens unit.

公开(公告)号：US20160102970A1

公开(公告)日：2016-04-14

申请号：US14777653

申请日：2014-03-17

Applicant: SNU Precision Co., Ltd.

Inventor： Tae Yong Jo ,  Young Min Hwang ,  Seong Ryong Kim ,  Sang Soo Kang ,  Heui Jae Pahk

IPC: G01B11/24 ,  G01J3/50

CPC classification number: G01B11/2441 ,  G01B9/02029 ,  G01B9/02034 ,  G01B9/02057 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/50 ,  G01J3/506 ,  G01N21/8806 ,  G01N21/95 ,  G01N2021/8845 ,  G01N2021/9513

Abstract: Provided herein is a three-dimensional shape measurement apparatus capable of measuring a shape of a measurement object using an interferometer and color information of the measurement object, the apparatus including a light source for emitting a light; a light divider for reflecting the light emitted from the light source or transmitting a light reflected by the measurement object; a lens unit for focusing the light reflected by the light divider Onto the measurement object; a light detector for detecting the light reflected from the measurement object; and a light adjuster arranged on a light path between the light source and the light divider, and configured to interrupt the light being emitted from a central area of the light source to reduce interference of light occurring in the lens unit.

Abstract translation: 本发明提供一种三维形状测量装置，其能够使用干涉仪测量测量对象的形状和测量对象的颜色信息，该装置包括用于发光的光源; 用于反射从光源发射的光或透射由测量对象反射的光的光分离器; 用于将由分光器反射的光聚焦到测量对象上的透镜单元; 光检测器，用于检测从测量对象反射的光; 以及光调节器，布置在光源和分光器之间的光路上，并且被配置为中断从光源的中心区域发射的光，以减少在透镜单元中发生的光的干涉。