公开(公告)号：US20170369303A1

公开(公告)日：2017-12-28

申请号：US15542779

申请日：2015-11-27

Applicant: SONY CORPORATION

Inventor： SHINYA MORITA ,  KOICHI IKEDA

IPC: B81B3/00 ,  H02N1/00 ,  H01H59/00

CPC classification number: B81B3/0021 ,  B81B3/0013 ,  B81B3/0016 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2203/04 ,  B81B2203/051 ,  H01H59/0009 ,  H02N1/00 ,  H02N1/008

Abstract: An electrostatic actuator includes a base, a movable electrode including a semiconductor and supported to the base to be displaceable in a first direction, and a fixed electrode including the semiconductor and fixed to the base, in which the fixed electrode faces the movable electrode in a state of being separated therefrom in the first direction. The electrostatic actuator includes a high-resistance region formed in at least a portion of each of respective facing surfaces of the movable electrode and the fixed electrode, and lower in impurity concentration than a surrounding region thereof.