公开(公告)号：US3875366A

公开(公告)日：1975-04-01

申请号：US30078772

申请日：1972-10-25

Applicant: STEIGERWALD STRAHLTECH

Inventor： VON WALTER ALFRED

IPC: B23K15/02 ,  H01J37/24 ,  H01J37/302 ,  H01J37/304 ,  B23K15/00

CPC classification number: H01J37/304 ,  B23K15/02 ,  H01J37/243 ,  H01J37/3023

Abstract: A method for regulating the beam current in industrial chargecarrier beam apparatus in which, by direct measurement of a beam of charge carriers produced in pulse form within the region of the beam path, measurement signals, which in each case are dependent essentially on the peak value of the pulse amplitudes, are derived for the subsequent formation of analog control variables serving for the regulation of the beam current, the measurement signals being first stored in each case in accordance with a pulse spacing.

Abstract translation: 一种用于调节工业电荷载波束装置中的束流的方法，其中通过在波束路径的区域内以脉冲形式产生的电荷载流子束的直接测量，测量信号在每种情况下都基本上取决于 导出脉冲幅度的峰值，用于随后形成用于调节束电流的模拟控制变量，根据脉冲间隔首先将测量信号存储在每种情况下。