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公开(公告)号:US11569239B2
公开(公告)日:2023-01-31
申请号:US17126195
申请日:2020-12-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiseok Lee , Bong-Soo Kim , Jiyoung Kim , Hui-Jung Kim , Seokhan Park , Hunkook Lee , Yoosang Hwang
IPC: H01L27/108 , H01L23/528 , H01L29/08 , H01L29/165 , H01L29/10 , H01L23/522 , H01L49/02
Abstract: Semiconductor memory devices may include first and second stacks on a substrate and first and second interconnection lines on the first and second stacks. Each of the first and second stacks may include semiconductor patterns vertically stacked on the substrate, conductive lines connected to the semiconductor patterns, respectively, and a gate electrode that is adjacent to the semiconductor patterns and extends in a vertical direction. The first stack may include a first conductive line and a first gate electrode, and the second stack may include a second conductive line and a second gate electrode. Lower surfaces of the first and second conductive lines may be coplanar. The first interconnection line may be electrically connected to at least one of the first and second conductive lines. The second interconnection line may be electrically connected to at least one of the first and second gate electrodes.
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公开(公告)号:US10720211B2
公开(公告)日:2020-07-21
申请号:US16458594
申请日:2019-07-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Sungwoo Kim , Bong-Soo Kim , Youngbae Kim , Kijae Hur , Gwanhyeob Koh , Hyeongsun Hong , Yoosang Hwang
IPC: H01L27/00 , G11C14/00 , H01L27/24 , H01L23/528 , G11C13/00 , G11C5/02 , G11C11/00 , H01L45/00 , H01L27/108
Abstract: A semiconductor device includes: a first memory section, a first peripheral circuit section, and a second peripheral circuit section that are disposed on a substrate; and a second memory section and a wiring section that are stacked on the second peripheral circuit section, wherein the first memory section includes a plurality of first memory cells, each of the first memory cells including a cell transistor and a capacitor connected to the cell transistor, the second memory section includes a plurality of second memory cells, each of the second memory cells including a variable resistance element and a select element coupled in series to each other, and the wiring section includes a plurality of line patterns, wherein the line patterns and the second memory cells are higher than the capacitor with respect to the substrate.
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公开(公告)号:US10573652B2
公开(公告)日:2020-02-25
申请号:US15945401
申请日:2018-04-04
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Myeong-Dong Lee , Jun-Won Lee , Ki Seok Lee , Bong-Soo Kim , Seok Han Park , Sung Hee Han , Yoo Sang Hwang
IPC: H01L27/108 , H01L23/532 , H01L23/522 , H01L23/528
Abstract: A semiconductor device includes a substrate having a trench, a bit line in the trench, a first spacer extending along the trench and at least a portion of a side surface of the bit line and in contact with the bit line, and a second spacer disposed within the trench on the first spacer. The bit line is narrower than the trench, and the first spacer includes silicon oxide. A method of forming a semiconductor device includes forming a trench in a substrate, forming a bit line within the first trench of width less than that of the first trench, and forming a first spacer that lines a portion of the trench and includes silicon oxide in contact with at least a portion of a side surface of the bit line, and forming a second spacer over the first spacer in the trench.
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公开(公告)号:US10483346B2
公开(公告)日:2019-11-19
申请号:US16115690
申请日:2018-08-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ki-hyung Nam , Bong-Soo Kim , Yoosang Hwang
IPC: H01L29/41 , H01L49/02 , H01L27/108 , H01L21/311 , H01L21/285 , H01L21/02 , H01L21/3213 , H01L27/112
Abstract: A semiconductor device including a plurality of pillars on a semiconductor substrate; and a support pattern in contact with some lateral surfaces of the pillars and connecting the pillars with one another, wherein the support pattern includes openings that expose other lateral surfaces of the pillars, each of the pillars includes a first pillar upper portion in contact with the support pattern and a second pillar upper portion spaced apart from the support pattern, and the second pillar upper portion has a concave slope.
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公开(公告)号:US20190088739A1
公开(公告)日:2019-03-21
申请号:US15890707
申请日:2018-02-07
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kiseok Lee , Myeong-Dong Lee , Hui-Jung Kim , Dongoh Kim , Bong-Soo Kim , Seokhan Park , Woosong Ahn , Sunghee Han , Yoosang Hwang
IPC: H01L29/06 , H01L27/108 , H01L23/528 , H01L23/535
Abstract: A semiconductor memory device includes a substrate including active regions, word lines in the substrate and each extending in a first direction parallel to an upper surface of the substrate, bit line structures connected to the active regions, respectively, and each extending in a second direction crossing the first direction, and spacer structures on sidewalls of respective ones of the bit line structures. Each of the spacer structures includes a first spacer, a second spacer, and a third spacer. The second spacer is disposed between the first spacer and the third spacer and includes a void defined by an inner surface of the second spacer. A height of the second spacer is greater than a height of the void.
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公开(公告)号:US20190027200A1
公开(公告)日:2019-01-24
申请号:US15984914
申请日:2018-05-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sungwoo Kim , Bong-Soo Kim , Youngbae Kim , Kijae Hur , Gwanhyeob Koh , Hyeongsun Hong , Yoosang Hwang
IPC: G11C11/00 , H01L27/108 , H01L27/24 , H01L23/528 , H01L49/02 , H01L45/00
CPC classification number: G11C11/005 , G11C5/025 , G11C14/0045 , H01L23/528 , H01L27/10814 , H01L27/10823 , H01L27/10897 , H01L27/2409 , H01L27/2427 , H01L27/2463 , H01L28/60 , H01L45/06 , H01L45/1233 , H01L45/144
Abstract: A semiconductor device including: a first memory section, a first peripheral circuit section, and a second peripheral circuit section that are disposed next to each other on a substrate; and a second memory section laterally spaced apart from the first memory section, the second peripheral circuit section and the second memory section disposed next to each other on the substrate, wherein the first memory section includes a plurality of first memory cells, each of the first memory cells including a cell transistor and a capacitor connected to the cell transistor, and the second memory section includes a plurality of second memory cells, each of the second memory cells including a variable resistance element and a select element coupled in series to each other, wherein the second memory cells are higher from the substrate than each of the capacitors.
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公开(公告)号:US10037996B2
公开(公告)日:2018-07-31
申请号:US15646380
申请日:2017-07-11
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daeik Kim , Bong-Soo Kim , Jemin Park , Yoosang Hwang
IPC: H01L27/00 , H01L27/108 , H01L21/3205 , H01L21/762 , H01L23/528 , H01L29/06 , H01L21/266 , H01L21/3213 , H01L23/532
CPC classification number: H01L27/10814 , H01L21/266 , H01L21/3205 , H01L21/32051 , H01L21/32134 , H01L21/76224 , H01L23/5283 , H01L23/53257 , H01L23/53261 , H01L27/10823 , H01L27/10855 , H01L27/10885 , H01L27/10888 , H01L29/0649
Abstract: A semiconductor device includes a substrate, a bit line structure on the substrate, a first contact structure on a sidewall of the bit line structure, a second contact structure on the bit line structure and spaced apart from the first contact structure across the bit line structure, and an insulation pattern between the bit line structure and the first contact structure. The second contact structure covers at least a portion of a top surface of the bit line structure. The insulation pattern comprises a protrusion that protrudes from a sidewall of the insulation pattern that immediately adjacent to the bit line structure. The protrusion protrudes in a first direction parallel to a top surface of the substrate.
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公开(公告)号:US20170323893A1
公开(公告)日:2017-11-09
申请号:US15584342
申请日:2017-05-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daeik Kim , Bong-Soo Kim , Jemin Park , Taejin Park , Yoosang Hwang
IPC: H01L27/108
CPC classification number: H01L27/10885 , H01L27/10814 , H01L27/10823 , H01L27/10852 , H01L27/10876
Abstract: Semiconductor devices are provided. A semiconductor device includes a substrate. The semiconductor device includes a stack structure on the substrate. The stack structure includes a first insulating material and a second insulating material that is on the first insulating material. The semiconductor device includes a spacer that extends from a sidewall of the first insulating material of the stack structure to a portion of a sidewall of the second insulating material of the stack structure. Moreover, the semiconductor device includes a conductive line that is on the spacer. Methods of forming semiconductor devices are also provided.
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公开(公告)号:US11616065B2
公开(公告)日:2023-03-28
申请号:US17090419
申请日:2020-11-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jiyoung Kim , Kiseok Lee , Bong-Soo Kim , Junsoo Kim , Dongsoo Woo , Kyupil Lee , HyeongSun Hong , Yoosang Hwang
IPC: H01L27/108 , H01L27/06 , H01L49/02
Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.
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公开(公告)号:US11521977B2
公开(公告)日:2022-12-06
申请号:US17471824
申请日:2021-09-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kiseok Lee , Chan-Sic Yoon , Augustin Hong , Keunnam Kim , Dongoh Kim , Bong-Soo Kim , Jemin Park , Hoin Lee , Sungho Jang , Kiwook Jung , Yoosang Hwang
IPC: H01L27/108 , H01L27/24 , H01L27/22
Abstract: A method of manufacturing a semiconductor memory device and a semiconductor memory device, the method including providing a substrate that includes a cell array region and a peripheral circuit region; forming a mask pattern that covers the cell array region and exposes the peripheral circuit region; growing a semiconductor layer on the peripheral circuit region exposed by the mask pattern such that the semiconductor layer has a different lattice constant from the substrate; forming a buffer layer that covers the cell array region and exposes the semiconductor layer; forming a conductive layer that covers the buffer layer and the semiconductor layer; and patterning the conductive layer to form conductive lines on the cell array region and to form a gate electrode on the peripheral circuit region.
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