-
公开(公告)号:US20250167107A1
公开(公告)日:2025-05-22
申请号:US18775049
申请日:2024-07-17
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyungeun Choi , Taejin Park , Suklae Kim , Cheonbae Kim , Sungsoo Yim , Yoona Jang , Hyunyong Jeong
IPC: H01L23/522 , G11C5/06 , H01L23/528 , H10B12/00
Abstract: A semiconductor device is provided. The semiconductor device includes a first structure having a memory block region and an extension region; and a second structure having a peripheral circuit region. The first structure includes memory cells and a word line. The second structure includes a semiconductor body; a through-insulating pattern in the semiconductor body; and a peripheral transistor. The first and second structures include a word line signal path electrically connecting the word line to the peripheral transistor. The word line signal path includes a word line contact that is in contact with the word line in the extension region; a word line routing lower structure electrically connected to the word line contact and extending from the extension region into the memory block region; and a word line routing connection structure electrically connecting the word line routing lower structure to the word line routing peripheral structure.
-
公开(公告)号:US20240349491A1
公开(公告)日:2024-10-17
申请号:US18534400
申请日:2023-12-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Myeong-Dong Lee , Jongmin Kim , Taejin Park , Seung-Bo Ko , Hui-Jung Kim
IPC: H10B12/00
CPC classification number: H10B12/485 , H10B12/482 , H10B12/488
Abstract: An example semiconductor memory device includes first and second active patterns, which are extended in a first direction and are disposed side by side in a second direction. Each of the first and second active patterns includes first and second edge portions, which are spaced apart from each other in the first direction. A pair of word lines are disposed to cross each of the first and second active patterns, a pair of bit lines are disposed on each of the first and second active patterns and are extended in a third direction, and a storage node contacts on the first edge portion of the first active pattern. When measured in the second direction, a first width of the storage node contact at a first level is larger than a second width at a second level. The first level is lower than the second level.
-
公开(公告)号:US11889681B2
公开(公告)日:2024-01-30
申请号:US17720664
申请日:2022-04-14
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taejin Park , Taehoon Kim , Kyujin Kim , Chulkwon Park , Sunghee Han , Yoosang Hwang
IPC: H10B12/00
CPC classification number: H10B12/34 , H10B12/053 , H10B12/315 , H10B12/482
Abstract: An integrated circuit device includes a substrate having an active region and a word line trench therein. The word line trench includes a lower portion having a first width, and an upper portion, which extends between the lower portion and a surface of the substrate and has a second width that is greater than the first width. A word line is provided, which extends in and adjacent a bottom of the word line trench. A gate insulation layer is provided, which extends between the word line and sidewalls of the lower portion of the word line trench. An electrically insulating gate capping layer is provided in the upper portion of the word line trench. An insulation liner is provided, which extends between the gate capping layer and sidewalls of the upper portion of the word line trench. The gate insulation layer extends between the insulation liner and a portion of the gate capping layer, which extends within the upper portion of the word line trench.
-
公开(公告)号:US11881399B2
公开(公告)日:2024-01-23
申请号:US17949418
申请日:2022-09-21
Inventor: Kyung-Eun Byun , Hyoungsub Kim , Taejin Park , Hoijoon Kim , Hyeonjin Shin , Wonsik Ahn , Mirine Leem , Yeonchoo Cho
IPC: H01L21/02
CPC classification number: H01L21/02568 , H01L21/0262 , H01L21/02491 , H01L21/02658
Abstract: A method of forming a transition metal dichalcogenide thin film on a substrate includes treating the substrate with a metal organic material and providing a transition metal precursor and a chalcogen precursor around the substrate to synthesize transition metal dichalcogenide on the substrate. The transition metal precursor may include a transition metal element and the chalcogen precursor may include a chalcogen element.
-
5.
公开(公告)号:US11282787B2
公开(公告)日:2022-03-22
申请号:US16879009
申请日:2020-05-20
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taejin Park , Keunnam Kim , Sohyun Park , Jin-Hwan Chun , Wooyoung Choi , Sunghee Han , Inkyoung Heo , Yoosang Hwang
IPC: H01L29/40 , H01L23/48 , H01L23/52 , H01L23/528 , H01L29/06 , G11C5/10 , H01L29/423 , H01L27/108 , H01L21/768
Abstract: The semiconductor device provided comprises a substrate that includes active regions that extends in a first direction and a device isolation layer that defines the active regions, word lines that run across the active regions in a second direction that intersects the first direction, bit-line structures that intersect the active regions and the word lines and that extend in a third direction that is perpendicular to the second direction, first contacts between the bit-line structures and the active regions, spacer structures on sidewalls of the bit-line structures, and second contacts that are between adjacent bit-line structures and are connected to the active regions. Each of the spacer structures extends from the sidewalls of the bit-line structures onto a sidewall of the device isolation layer.
-
公开(公告)号:US10269808B2
公开(公告)日:2019-04-23
申请号:US15584342
申请日:2017-05-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daeik Kim , Bong-Soo Kim , Jemin Park , Taejin Park , Yoosang Hwang
IPC: H01L27/108
Abstract: Semiconductor devices are provided. A semiconductor device includes a substrate. The semiconductor device includes a stack structure on the substrate. The stack structure includes a first insulating material and a second insulating material that is on the first insulating material. The semiconductor device includes a spacer that extends from a sidewall of the first insulating material of the stack structure to a portion of a sidewall of the second insulating material of the stack structure. Moreover, the semiconductor device includes a conductive line that is on the spacer. Methods of forming semiconductor devices are also provided.
-
公开(公告)号:US20250169066A1
公开(公告)日:2025-05-22
申请号:US18826334
申请日:2024-09-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daesun Kim , Suklae Kim , Cheonbae Kim , Youngseok Park , Taejin Park , Hyunchul Yoon , Hyeonkyu Lee , Sungsoo Yim , Hyungeun Choi
IPC: H10B12/00 , G11C11/408 , G11C11/4091 , H01L23/00 , H01L25/065 , H01L25/18
Abstract: Provided is a semiconductor device. The semiconductor device includes: a first connection region, a first memory block region, and a second connection region sequentially arranged; a first peripheral circuit region vertically overlapping with the first memory block region; first memory cells in the first memory block region; a first word line extending into the first and second connection regions by crossing the first memory block region, and electrically connected to the first memory cells; a first sub-word line driver in the first peripheral circuit region; and a first word line signal path electrically connecting the first word line and the first sub-word line driver. The first word line signal path includes at least one first routing contact coupled to the first word line in the first connection region, and at least one second routing contact coupled to the first word line in the second connection region.
-
公开(公告)号:US20250151260A1
公开(公告)日:2025-05-08
申请号:US18739698
申请日:2024-06-11
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Taehyuk Kim , Taejin Park , Hyeran Lee , Sungsoo Yim
Abstract: A semiconductor device includes bit line structures spaced apart from each other in a first direction, and each of the bit line structures extends in a second direction; channels on the bit line structures, wherein the channels are electrically connected to the bit line structures and spaced apart from each other in the first direction; a gate insulation pattern structure on sidewalls of each of the channels; a gate electrode structure including: a first gate electrode on a first sidewall of the gate insulation pattern structure; and a second gate electrode on a second sidewall of the gate insulation pattern structure, wherein the second sidewall faces the first sidewall in the second direction, wherein the second gate electrode is on a third sidewall in the first direction of an end portion of the gate insulation pattern structure, and wherein the second gate electrode contacts the first gate electrode.
-
公开(公告)号:US12069849B2
公开(公告)日:2024-08-20
申请号:US18124043
申请日:2023-03-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daeik Kim , Bong-Soo Kim , Jemin Park , Taejin Park , Yoosang Hwang
IPC: H10B12/00 , H01L21/3213 , H01L21/768 , H01L21/8234 , H01L29/66
CPC classification number: H10B12/482 , H01L21/3213 , H01L21/76829 , H01L21/76838 , H01L21/823468 , H01L29/6656 , H10B12/033 , H10B12/053 , H10B12/31 , H10B12/315 , H10B12/34
Abstract: Semiconductor devices are provided. A semiconductor device includes a substrate. The semiconductor device includes a stack structure on the substrate. The stack structure includes a first insulating material and a second insulating material that is on the first insulating material. The semiconductor device includes a spacer that extends from a sidewall of the first insulating material of the stack structure to a portion of a sidewall of the second insulating material of the stack structure. Moreover, the semiconductor device includes a conductive line that is on the spacer. Methods of forming semiconductor devices are also provided.
-
公开(公告)号:US20240224507A1
公开(公告)日:2024-07-04
申请号:US18541625
申请日:2023-12-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jongmin Kim , Taejin Park , Chansic Yoon , Kiseok Lee , Hongjun Lee
IPC: H10B12/00 , H01L29/417 , H01L29/423
CPC classification number: H10B12/34 , H01L29/41741 , H01L29/4236 , H10B12/315
Abstract: A semiconductor device includes an active pattern on a substrate, a gate structure, a conductive filling pattern and a bit line structure on the conductive filling pattern. The gate structure extends through an upper portion of the active pattern, and has an upper surface higher than an upper surface of the active pattern. The conductive filling pattern includes a lower portion on the active pattern and an upper portion thereon. The lower portion contacts an upper sidewall of the gate structure, and the upper portion has a width greater than a width of the lower portion.
-
-
-
-
-
-
-
-
-