Methods of forming an image sensor
    3.
    发明授权
    Methods of forming an image sensor 有权
    形成图像传感器的方法

    公开(公告)号:US09553119B2

    公开(公告)日:2017-01-24

    申请号:US14849187

    申请日:2015-09-09

    Abstract: Methods of forming an image sensor are provided. A method of forming an image sensor includes forming a trench in a substrate to define a unit pixel region of the substrate. The method includes forming an in-situ-doped passivation layer on an exposed surface of the trench. The method includes forming a capping pattern on the in-situ-doped passivation layer, in the trench. The method includes forming a photoelectric conversion region in the unit pixel region. Moreover, the method includes forming a floating diffusion region in the unit pixel region.

    Abstract translation: 提供了形成图像传感器的方法。 形成图像传感器的方法包括在衬底中形成沟槽以限定衬底的单位像素区域。 该方法包括在沟槽的暴露表面上形成原位掺杂的钝化层。 该方法包括在沟槽中的原位掺杂钝化层上形成封盖图案。 该方法包括在单位像素区域中形成光电转换区域。 此外,该方法包括在单位像素区域中形成浮动扩散区域。

    METHODS OF FORMING AN IMAGE SENSOR
    4.
    发明申请
    METHODS OF FORMING AN IMAGE SENSOR 有权
    形成图像传感器的方法

    公开(公告)号:US20160079288A1

    公开(公告)日:2016-03-17

    申请号:US14849187

    申请日:2015-09-09

    Abstract: Methods of forming an image sensor are provided. A method of forming an image sensor includes forming a trench in a substrate to define a unit pixel region of the substrate. The method includes forming an in-situ-doped passivation layer on an exposed surface of the trench. The method includes forming a capping pattern on the in-situ-doped passivation layer, in the trench. The method includes forming a photoelectric conversion region in the unit pixel region. Moreover, the method includes forming a floating diffusion region in the unit pixel region.

    Abstract translation: 提供了形成图像传感器的方法。 形成图像传感器的方法包括在衬底中形成沟槽以限定衬底的单位像素区域。 该方法包括在沟槽的暴露表面上形成原位掺杂的钝化层。 该方法包括在沟槽中的原位掺杂钝化层上形成封盖图案。 该方法包括在单位像素区域中形成光电转换区域。 此外,该方法包括在单位像素区域中形成浮动扩散区域。

    METHODS OF THERMALLY TREATING A SEMICONDUCTOR WAFER
    5.
    发明申请
    METHODS OF THERMALLY TREATING A SEMICONDUCTOR WAFER 有权
    热处理半导体波形的方法

    公开(公告)号:US20130171744A1

    公开(公告)日:2013-07-04

    申请号:US13715099

    申请日:2012-12-14

    Abstract: A method of thermally treating a wafer includes loading a wafer into a process chamber having one or more regions of uniform temperature gradient and one or more regions of non-uniform temperature gradient. A defect is detected in the wafer. The wafer is aligned to position the defect within one of the one or more regions of uniform temperature gradient. A rapid thermal process is performed on the wafer in the process chamber while the defect is positioned within one of the one or more regions of uniform temperature gradient.

    Abstract translation: 一种热处理晶片的方法包括将晶片装载到具有一个或多个均匀温度梯度区域和一个或多个不均匀温度梯度区域的处理室中。 在晶片中检测到缺陷。 将晶片对准以将缺陷定位在均匀温度梯度的一个或多个区域之一内。 在处理室中的晶片上执行快速热处理,同时将缺陷定位在均匀温度梯度的一个或多个区域之一内。

    Semiconductor device and method of fabricating the same
    9.
    发明授权
    Semiconductor device and method of fabricating the same 有权
    半导体装置及其制造方法

    公开(公告)号:US09443932B2

    公开(公告)日:2016-09-13

    申请号:US14330777

    申请日:2014-07-14

    Abstract: Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include a plurality of unit cells provided on a semiconductor substrate. Each of the unit cells may include a buried insulating pattern buried in the semiconductor substrate, a first active pattern provided on the buried insulating pattern, and a second active pattern provided on the buried insulating pattern and spaced apart from the first active pattern. The buried insulating pattern may define a unit cell region, in which each of the unit cells may be disposed.

    Abstract translation: 提供半导体器件及其制造方法。 半导体器件可以包括设置在半导体衬底上的多个单元电池。 每个单电池可以包括埋在半导体衬底中的掩埋绝缘图案,设置在掩埋绝缘图案上的第一有源图案和设置在掩埋绝缘图案上并与第一有源图案间隔开的第二有源图案。 埋置的绝缘图案可以限定单位单元区域,其中可以布置每个单位单元。

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