公开(公告)号：US20240310309A1

公开(公告)日：2024-09-19

申请号：US18546706

申请日：2022-02-03

Applicant: Scienta Omicron AB

Inventor： Mikael OLOFSSON

IPC: G01N23/227

CPC classification number: G01N23/227

Abstract: Described are illumination control devices, for an analyser arrangement and method of using thereof. The analyser arrangement is configured to determine at least one parameter related to charged particles emitted from a sample. The illumination control device comprises an input for input electromagnetic radiation, and is configured to control the illumination of the sample to induce the emission of charged particles from the sample and to operate in at least a first mode and a second mode, wherein the illumination control device in the first mode, is configured to illuminate a first area of the sample with a first part of the input electromagnetic radiation and a second area part of the first area of the sample with a second part of the input electromagnetic radiation, and in a second mode, is configured to illuminate the second area of the sample with the second part of the input electromagnetic radiation.

公开(公告)号：US20240110882A1

公开(公告)日：2024-04-04

申请号：US18274580

申请日：2022-01-19

Applicant: Scienta Omicron AB

Inventor： Mikael OLOFSSON ,  Patrik KARLSSON

IPC: G01N23/2273 ,  H01J49/06

CPC classification number: G01N23/2273 ,  H01J49/06

Abstract: Described is an angle-resolving photoelectron spectrometer comprising an electrostatic lens system having a first end and a second end, and arranged to form a beam of electrons emitted from a measurement area on a sample surface, and to transport the electrons to the second end, wherein the first lens element is configured to be arranged at a positive voltage in relation to the sample. The spectrometer comprises at least a first shielding electrode with a limiting aperture, arranged such that the angle between the optical axis and any point on the limiting aperture is larger than 45° and smaller than 70, and at least one compensation electrode which is arranged around the optical axis at a larger distance from the measurement area than the first lens element. The compensation electrode is configured to be arranged at a negative voltage in relation to the sample.