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公开(公告)号：US12123827B2
公开(公告)日：2024-10-22
申请号：US17501600
申请日：2021-10-14
Applicant: TAMRON CO., LTD.
Inventor： Jie Li , Shunya Fukui
CPC classification number: G01N21/33 , G01J3/0205 , G01J3/42
Abstract: In a plasmonic structure, a first conductor layer, a dielectric layer, and a second conductor layer are stacked in this order. The second conductor layer includes a plurality of conductor patterns that is two-dimensionally and periodically arranged, each of the plurality of conductor patterns having a circular shape or a regular polygonal shape. A diameter D of a circle circumscribed on each of the plurality of conductor patterns satisfies 200 nm≤D≤800 nm. A thickness g of the dielectric layer and the diameter D satisfy 0.3≤g/D≤0.6.
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