公开(公告)号：US10883924B2

公开(公告)日：2021-01-05

申请号：US14847624

申请日：2015-09-08

Applicant: THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK

Inventor： Sam O' Mullane ,  Alain C. Diebold ,  Brennan Peterson ,  Nicholas Keller

IPC: G01N21/21 ,  G01B11/02 ,  G01N21/95 ,  G01N21/956

Abstract: There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating.

公开(公告)号：US20160069792A1

公开(公告)日：2016-03-10

申请号：US14847624

申请日：2015-09-08

Applicant: THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK

Inventor： Sam O'Mullane ,  Alain C. Diebold ,  Brennan Peterson ,  Nicholas Keller

IPC: G01N21/21 ,  G01N21/95 ,  G01B11/02

CPC classification number: G01N21/211 ,  G01B11/02 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213 ,  G01N2201/0683

Abstract: There is set forth herein in one embodiment, a structure including a metallic grating having a grating pattern, the metallic grating including a critical dimension. The metallic grating can output a spectral profile when exposed to electromagnetic radiation, the spectral profile having a feature. The grating pattern can be configured so that a change of the critical dimension produces a shift in a value of the feature of the spectral profile. A method can include propagating input electromagnetic radiation onto a metallic grating having a two dimensional periodic grating pattern and measuring a critical dimension of the metallic grating using output electromagnetic radiation from the metallic grating.

Abstract translation: 这里在一个实施例中阐述了包括具有光栅图案的金属光栅的结构，金属光栅包括临界尺寸。 当暴露于电磁辐射时，金属光栅可以输出光谱轮廓，光谱轮廓具有特征。 光栅图案可以被配置成使得临界尺寸的变化产生光谱轮廓的特征值的偏移。 一种方法可以包括将输入电磁辐射传播到具有二维周期性光栅图案的金属光栅上，并使用来自金属光栅的输出电磁辐射来测量金属光栅的临界尺寸。