公开(公告)号：US12286541B2

公开(公告)日：2025-04-29

申请号：US16643542

申请日：2018-08-29

Applicant: TOKUYAMA CORPORATION

Inventor： Hiromasa Fujioka ,  Osamu Tanaka ,  Hiroaki Taira ,  Naoki Mikami ,  Toshiaki Ootani

IPC: C01B33/14 ,  C01B33/141 ,  C09C3/08 ,  C09C3/10 ,  H01L23/29

Abstract: This surface-treated sol-gel silica is characterized by containing sol-gel silica having an average particle size of 0.05 μm or more and 2.0 μm or less as measured by laser diffraction scattering and a surface treatment agent on the surface of the sol-gel silica. In a dispersion produced by dispersing 5 mass % of the sol-gel silica in ethanol by emitting ultrasonic waves at 40W for 10 minutes, the content of particles with particle sizes of 5 μm or more is 10 ppm or less in a particle number size distribution obtained by a Coulter counter method.