公开(公告)号：US20190155147A1

公开(公告)日：2019-05-23

申请号：US16252632

申请日：2019-01-19

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Akihito OKUMURA ,  Hiroaki MIYAJI ,  Takehiro YAMADA

IPC: G03F1/70 ,  G02F1/1335 ,  G03F7/20 ,  G03F7/00 ,  G03F1/76

Abstract: A photomask is used for scanning type projection exposure provided with a projection lens assembly composed of a lens assembly. A line width in a plurality of patterns of the photomask in a region to be transferred by performing scanning exposure including connecting portions of the lens assembly are corrected with respect to a line width of patterns which are the same as the patterns of the photomask present in a region to be transferred by performing scanning exposure but do not include the connecting portions.

公开(公告)号：US20210271160A1

公开(公告)日：2021-09-02

申请号：US17323732

申请日：2021-05-18

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Akihito OKUMURA ,  Hiroaki MIYAJI ,  Takehiro YAMADA

IPC: G03F1/70 ,  G03F7/20 ,  G03F1/00 ,  G02F1/1335 ,  G03F1/76 ,  G03F7/00

Abstract: A photomask is used for scanning type projection exposure provided with a projection lens assembly composed of a lens assembly. A line width in a plurality of patterns of the photomask in a region to be transferred by performing scanning exposure including connecting portions of the lens assembly are corrected with respect to a line width of patterns which are the same as the patterns of the photomask present in a region to be transferred by performing scanning exposure but do not include the connecting portions.

公开(公告)号：US20210072572A1

公开(公告)日：2021-03-11

申请号：US17098869

申请日：2020-11-16

Applicant: TOPPAN PRINTING CO., LTD.

Inventor： Takehiro YAMADA ,  Yusuke HIGASHI

IPC: G02F1/137 ,  G02F1/1343 ,  G02F1/13 ,  G01N21/59 ,  G01N1/28 ,  E06B9/24

Abstract: A light control device including a light control sheet including a light control layer switchable between at least a first state and a second state by changing alignment of liquid crystal molecules by application of a drive voltage, and transparent electrode layers sandwiching the light control layer. The light control layer is transparent in the first state and turbid in the second state. The light control layer is in the second state when there is no application of the drive voltage. When the light control layer is in the second state, the light control sheet has a transmitted image definition of 70% or less, where the transmitted image definition is based on JIS K 7374:2007 with an optical comb width set to 0.125 mm.