公开(公告)号：US20160111585A1

公开(公告)日：2016-04-21

申请号：US14517959

申请日：2014-10-20

Applicant: TSMC Solar Ltd.

Inventor： Shih-Wei CHEN

IPC: H01L31/18 ,  H01L31/032

CPC classification number: H01L31/186 ,  H01L21/02557 ,  H01L21/0256 ,  H01L21/02568 ,  H01L21/02628 ,  H01L21/02664 ,  H01L31/0322 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

Abstract: Methods and systems for repairing oxidation of CIGS surfaces during manufacture of a CIGS solar cell are generally disclosed. Oxidation of an absorber reduces the photoluminescence intensity of the CIGS surface. The absorber is immersed in a reduction tank having a reducing reagent therein. The reducing reagent reverses the oxidation of the CIGS absorber, increasing the interface quality and corresponding photoluminescence intensity. After reversing the oxidation, a buffer layer is deposited on the CIGS absorber to prevent further surface oxidation.

Abstract translation: 通常公开了在制造CIGS太阳能电池期间修复CIGS表面氧化的方法和系统。 吸收剂的氧化降低了CIGS表面的光致发光强度。 吸收器浸入其中具有还原剂的还原罐中。 还原剂反转CIGS吸收剂的氧化，增加界面质量和相应的光致发光强度。 在反转氧化之后，缓冲层沉积在CIGS吸收器上以防止进一步的表面氧化。

公开(公告)号：US20150263198A1

公开(公告)日：2015-09-17

申请号：US14203722

申请日：2014-03-11

Applicant: TSMC Solar Ltd.

Inventor： Shih-Wei CHEN

IPC: H01L31/032 ,  H01L31/18

CPC classification number: H01L31/0322 ,  H01L31/022466 ,  Y02E10/541 ,  Y02P70/521

Abstract: A method of forming a CIGS absorber wherein at least one source particle is selected and prepared as a powder or gel; the powder or gel is deposited on a substrate, compressed, and annealed. In some embodiments, a plurality of source particles are prepared as powders and mixed prior to deposition, compression, and annealing. In other embodiments, a plurality of source particles are individually deposited in layers, collectively compressed, and collectively annealed. In yet further embodiments, a plurality of source particles are individually deposited in layers, individually compressed, and collectively annealed.

Abstract translation: 一种形成CIGS吸收剂的方法，其中选择和制备至少一种源粒子作为粉末或凝胶; 将粉末或凝胶沉积在基底上，进行压缩和退火。 在一些实施方案中，多个源粒子被制备成粉末并在沉积，压缩和退火之前混合。 在其他实施例中，多个源粒子被分别沉积成层，共同压缩并且共同退火。 在另外的实施例中，多个源粒子被分别沉积成层，分别压缩并且共同退火。

公开(公告)号：US20140206132A1

公开(公告)日：2014-07-24

申请号：US14219628

申请日：2014-03-19

Applicant: TSMC SOLAR LTD.

Inventor： Wen-Tsai YEN ,  Chung-Hsien WU ,  Shih-Wei CHEN ,  Wen-Chin LEE

IPC: H01L31/18

CPC classification number: H01L31/18 ,  H01L31/03923 ,  Y02E10/541

Abstract: A solar cell includes an absorber layer formed of a CIGAS, copper, indium, gallium, aluminum, and selenium. A method for forming the absorber layer provides for using an indium-aluminum target and depositing an aluminum-indium film as a metal precursor layer using sputter deposition. Additional metal precursor layers such as aCuGa layer are also provided and a thermal processing operation causes the selenization of the metal precursor layers. The thermal processing operation/selenization operation converts the metal precursor layers to an absorber layer. In some embodiments, the absorber layer includes a double graded chalcopyrite-based bandgap.

Abstract translation: 太阳能电池包括由CIGAS，铜，铟，镓，铝和硒形成的吸收层。 用于形成吸收层的方法提供使用铟 - 铝靶并使用溅射沉积沉积作为金属前体层的铝铟膜。 还提供另外的金属前体层，例如CuGa层，并且热处理操作引起金属前体层的硒化。 热处理操作/硒化操作将金属前体层转换成吸收层。 在一些实施例中，吸收层包括基于双梯度黄铜矿的带隙。

公开(公告)号：US20150236183A1

公开(公告)日：2015-08-20

申请号：US14183557

申请日：2014-02-19

Applicant: TSMC Solar Ltd.

Inventor： Shih-Wei CHEN

IPC: H01L31/052 ,  H01L31/18

CPC classification number: H01L31/052 ,  H01L31/0463 ,  H01L31/0465 ,  H01L31/073 ,  H01L31/0749 ,  Y02E10/541 ,  Y02E10/543

Abstract: A solar cell device and a method of fabricating the device is described. The solar cell is fabricated by providing a substrate, depositing a back contact over the substrate, depositing an absorber over the back contact, depositing a front contact over the absorber, and embedding a highly thermally conductive material within the solar cell. The highly thermally conductive material can be embedded as a highly thermally conductive layer between the substrate and the back contact, a highly thermally conductive fill within a P3 scribe line, or both.

Abstract translation: 对太阳能电池装置及其制造方法进行说明。 太阳能电池通过提供衬底，在衬底上沉积背接触，在背接触上沉积吸收体，在吸收体上沉积前接触，并在太阳能电池内嵌入高导热材料来制造太阳能电池。 高导热性材料可以作为高度导热的层被嵌入在衬底和背面接触之间，P3划线内的高导热性填料，或两者都是。

公开(公告)号：US20150004734A1

公开(公告)日：2015-01-01

申请号：US13929827

申请日：2013-06-28

Applicant: TSMC Solar Ltd.

Inventor： Shih-Wei CHEN

IPC: H01L31/18

CPC classification number: H01L31/0463 ,  H01L21/6715 ,  Y02E10/50

Abstract: A method for fabricating a solar cell using a nozzle assembly that includes a base portion, a scriber coupled to the base portion, and a nozzle coupled to the base portion such that the nozzle is positioned a predefined distance from a tip of the scriber is provided. The method generally comprises positioning a substructure that includes a buffer layer and an absorber layer proximate to the base portion. A P2 line is scribed through the buffer and absorber layers of the substructure using the scriber tip. A nanoparticle solution is sprayed, using the nozzle, onto at least one portion of the buffer layer at a predefined pressure when the P2 line is being scribed through the buffer and absorber layers such that a transparent conductive oxide (TCO) layer is inhibited from forming over the portion of the buffer layer that is being sprayed with the nanoparticle solution.

Abstract translation: 提供一种使用喷嘴组件制造太阳能电池的方法，所述喷嘴组件包括基部，连接到所述基部的划线器和连接到所述基部的喷嘴，使得所述喷嘴位于距离所述划线器的尖端预定距离的位置 。 该方法通常包括定位包括缓冲层和接近基部的吸收层的子结构。 使用划线器尖端通过底层结构的缓冲层和吸收层划线P2线。 当P2线通过缓冲层和吸收层进行划线时，使用喷嘴将纳米颗粒溶液以预定的压力喷射到缓冲层的至少一部分上，使得透明导电氧化物（TCO）层被抑制形成 在被纳米颗粒溶液喷射的缓冲层的部分上。

公开(公告)号：US20140144769A1

公开(公告)日：2014-05-29

申请号：US13689172

申请日：2012-11-29

Applicant: TSMC SOLAR LTD.

Inventor： Wen-Tsai YEN ,  Chung-Hsien WU ,  Shih-Wei CHEN ,  Ying-Hsin WU ,  Jui-Fu HSUEH ,  Kuan-Chu CHEN

IPC: C23C14/34

CPC classification number: C23C14/086 ,  C23C14/3407 ,  C23C14/3492 ,  C23C14/56 ,  H01J37/32651

Abstract: A sputtering apparatus comprises a chamber configured to contain at least one sputter target and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one sputter target and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape.

Abstract translation: 溅射装置包括被配置为容纳至少一个溅射靶和待涂覆的至少一个基底的室。 腔室具有至少一个限定可调节孔径的可调节屏蔽构件。 该构件位于至少一个溅射靶和至少一个衬底之间。 孔径可以在由面积和形状组成的组中的至少一个中调节。

公开(公告)号：US20160111566A1

公开(公告)日：2016-04-21

申请号：US14517961

申请日：2014-10-20

Applicant: TSMC Solar Ltd.

Inventor： Shih-Wei CHEN

IPC: H01L31/032 ,  H01L31/0224 ,  B05C11/10 ,  H01L31/18 ,  B05C3/02 ,  B05B1/30

Abstract: The present disclosure provides systems and methods for depositing an alkaline metal layer on an absorber to generate a copper-poor region at a surface of the absorber. The copper-poor region provides an increased efficiency over non-treated absorbers having copper-rich surfaces. The alkaline metal layer may be deposited by any suitable deposition method, such as, for example, a wet deposition method. After the alkaline metal layer is deposited, the absorber is annealed, causing the alkaline metal layer to interact with the absorber to reduce the copper-profile of the absorber at the interface between the alkaline metal layer and the absorber.

Abstract translation: 本公开提供了用于在吸收体上沉积碱金属层以在吸收体的表面产生贫铜区的系统和方法。 与具有富铜表面的未处理的吸收体相比，贫铜区提供了更高的效率。 碱金属层可以通过任何合适的沉积方法沉积，例如湿法沉积法。 在沉积碱金属层之后，对吸收体进行退火，使碱金属层与吸收体相互作用，以减少吸收体在碱金属层与吸收体之间的界面处的铜型面。

公开(公告)号：US20150263215A1

公开(公告)日：2015-09-17

申请号：US14210487

申请日：2014-03-14

Applicant: TSMC SOLAR LTD.

Inventor： Shih-Wei CHEN

IPC: H01L31/18 ,  H01L31/0749

CPC classification number: H01L31/18 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/67253

Abstract: A method for monitoring the process of fabricating solar cells includes delivering at least one solar cell substructure to a wash chamber having a wash solution therein, such that the solar cell substructure is at least partially immersed within the wash solution. A residual material is removed from the solar cell substructure using the wash solution. A pH value of the wash solution is detected automatically while the solar cell substructure is at least partially immersed within the wash solution, via a control apparatus. The method also includes determining whether the detected pH value is at a predefined threshold pH level or within a predefined pH range for the wash solution, via the control apparatus. The pH value of the wash solution is modified automatically if the detected pH value is different from the predefined threshold pH level or different from the predefined pH range.

Abstract translation: 用于监测制造太阳能电池的过程的方法包括将至少一个太阳能电池底层结构输送到其中具有洗涤溶液的洗涤室，使得太阳能电池底层结构至少部分地浸入洗涤溶液中。 使用洗涤溶液从太阳能电池子结构中除去残留的材料。 通过控制装置将太阳能电池基础结构至少部分地浸入洗涤溶液内，自动检测洗涤溶液的pH值。 该方法还包括通过控制装置确定检测到的pH值是否处于预定阈值pH水平或洗涤溶液的预定pH范围内。 如果检测到的pH值不同于预定阈值pH值或不同于预定的pH范围，则洗涤溶液的pH值被自动修改。

公开(公告)号：US20150258581A1

公开(公告)日：2015-09-17

申请号：US14203592

申请日：2014-03-11

Applicant: TSMC SOLAR LTD.

Inventor： Shih-Wei CHEN

IPC: B08B3/04 ,  H01L31/18

CPC classification number: B08B3/044 ,  B08B3/10 ,  H01L31/0322 ,  H01L31/0749 ,  H01L31/18 ,  H01L31/1876 ,  Y02E10/541 ,  Y02P70/521

Abstract: A method for removing non-bonding compounds from absorber layers of a plurality of absorber substrates during a cleaning process comprises setting one or more conditions of a solution in a solvent tank used to clean the non-bonding compounds from the absorber layers of the absorber substrates. The method further comprises calculating thickness of boundary layers formed on the absorber layers based on hydrodynamics of the solution in the solvent tank during the cleaning process, and setting one or more of spacing between the absorber substrates and circulation speed of the solution in the solvent tank during the cleaning process. The method further comprises immersing and cleaning the absorber substrates in the solvent tank under one or more of the set conditions, spacing and circulation speed of the solution.

Abstract translation: 一种在清洁过程中从多个吸收体衬底的吸收层除去非接合化合物的方法，包括将溶液的一个或多个条件设定在用于从吸收体衬底的吸收层清洁非接合化合物的溶剂罐中 。 该方法还包括基于在清洁过程中基于溶剂罐中的溶液的流体动力学计算在吸收层上形成的边界层的厚度，并且设置吸收体基底之间的一个或多个间隔和溶剂槽中的溶液的循环速度 在清洁过程中。 该方法还包括在溶液的一个或多个设定条件，间隔和循环速度的一个或多个下将吸收体基底浸入和清洁溶剂罐。

公开(公告)号：US20150236187A1

公开(公告)日：2015-08-20

申请号：US14183555

申请日：2014-02-19

Applicant: TSMC Solar Ltd.

Inventor： Shih-Wei CHEN

IPC: H01L31/18 ,  H01L31/06 ,  H01L31/0296 ,  H01L31/0216 ,  H01L31/032

CPC classification number: H01L31/18 ,  H01L31/02167 ,  H01L31/0296 ,  H01L31/0322 ,  H01L31/0445 ,  H01L31/06 ,  H01L31/073 ,  H01L31/0749 ,  H01L31/186 ,  Y02E10/541 ,  Y02E10/543 ,  Y02P70/521

Abstract: A solar cell device and a method of fabricating the device is described. The solar cell is fabricated by forming a back contact layer on a front side of a substrate, forming an absorber layer on the back contact layer, applying a protective layer on a back side of the substrate, depositing a buffer layer on the absorber layer. Excess buffer materials are deposited on the substrate back side, and the protective layer with excess buffer materials are removed.

Abstract translation: 对太阳能电池装置及其制造方法进行说明。 太阳能电池通过在基板的正面上形成背面接触层，在背面接触层上形成吸收层，在基板的背面侧设置保护层，在吸收体层上形成缓冲层来制造。 过多的缓冲材料沉积在基板背面，并且除去具有多余缓冲材料的保护层。