公开(公告)号：US09103032B2

公开(公告)日：2015-08-11

申请号：US13672777

申请日：2012-11-09

Applicant: TSMC Solar Ltd.

Inventor： Edward Teng ,  Ying-Chen Chao ,  Chih-Jen Yang

IPC: C23C14/34 ,  C23C14/54 ,  C23C14/24 ,  C23C14/50 ,  C23C14/56 ,  C23C14/00 ,  C23C14/58 ,  C23C14/04

CPC classification number: C23C14/54 ,  C23C14/00 ,  C23C14/044 ,  C23C14/24 ,  C23C14/34 ,  C23C14/3464 ,  C23C14/505 ,  C23C14/541 ,  C23C14/56 ,  C23C14/564 ,  C23C14/568 ,  C23C14/5806

Abstract: Apparatus for forming a solar cell comprises a housing defining a chamber including a substrate support. A sputtering source is configured to deposit particles of a first type over at least a portion of a surface of a substrate on the substrate support. An evaporation source is configured to deposit a plurality of particles of a second type over the portion of the surface of the substrate. A cooling unit is provided between the sputtering source and the evaporation source. A control system is provided for controlling the evaporation source based on a rate of mass flux emitted by the evaporation source.

Abstract translation: 用于形成太阳能电池的装置包括限定包括衬底支撑件的腔室的壳体。 溅射源被配置成在衬底支撑件上的衬底的表面的至少一部分上沉积第一类型的颗粒。 蒸发源被配置为在衬底的表面的部分上沉积多个第二类型的颗粒。 在溅射源和蒸发源之间提供冷却单元。 提供一种控制系统，用于根据由蒸发源发出的质量通量的速率来控制蒸发源。

公开(公告)号：US09929304B2

公开(公告)日：2018-03-27

申请号：US14685667

申请日：2015-04-14

Applicant: TSMC Solar Ltd.

Inventor： Edward Teng ,  Ying-Chen Chao ,  Chih-Jen Yang

IPC: F27B5/14 ,  F27B5/06 ,  F27D3/12 ,  F27D11/02 ,  H01L31/18 ,  C23C14/22 ,  F27D5/00 ,  H01L31/032 ,  H01L21/67 ,  H01L21/687 ,  C23C14/18 ,  C23C14/34 ,  C23C14/58 ,  F27D3/00

CPC classification number: H01L31/1864 ,  C23C14/18 ,  C23C14/34 ,  C23C14/5806 ,  F27B5/14 ,  F27D5/0037 ,  F27D2003/0087 ,  H01L21/67109 ,  H01L21/68764 ,  H01L21/68771 ,  H01L31/0322 ,  H01L31/18 ,  Y02E10/541

Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.

公开(公告)号：US09029737B2

公开(公告)日：2015-05-12

申请号：US13733989

申请日：2013-01-04

Applicant: TSMC Solar Ltd.

Inventor： Edward Teng ,  Ying-Chen Chao ,  Chih-Jen Yang

IPC: F27B5/14 ,  F27B5/06 ,  F27D3/12 ,  F27D11/02 ,  H01L31/18 ,  C23C14/22 ,  F27D5/00 ,  H01L31/032 ,  H01L21/67 ,  H01L21/687 ,  F27D3/00

CPC classification number: H01L31/1864 ,  C23C14/18 ,  C23C14/34 ,  C23C14/5806 ,  F27B5/14 ,  F27D5/0037 ,  F27D2003/0087 ,  H01L21/67109 ,  H01L21/68764 ,  H01L21/68771 ,  H01L31/0322 ,  H01L31/18 ,  Y02E10/541

Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.

Abstract translation: 一种用于形成太阳能电池的装置包括限定真空室的壳体，可旋转基板支撑件，至少一个内部加热器和至少一个外部加热器。 衬底支撑件在配置成保持衬底的真空室内。 所述至少一个内部加热器位于所述真空室的中心和所述基板支撑件之间，并且被配置为加热所述基板支撑件上的基板的后表面。 所述至少一个外部加热器位于所述真空室的外表面和所述基板支撑件之间，并且被配置为加热所述基板支撑件上的基板的前表面。