公开(公告)号：US10469777B2

公开(公告)日：2019-11-05

申请号：US15560935

申请日：2016-03-22

Applicant: TechInsights Inc.

Inventor： Christopher Pawlowicz ,  Alexander Sorkin ,  Vladimir Martincevic

IPC: H01J37/304 ,  H01J37/26 ,  H01J37/22 ,  H04N5/357 ,  G01N23/2251 ,  H01J37/28

Abstract: Devices, systems and methods relating to a distortion-correcting imaging for collecting image-related data of a substrate are disclosed, comprising: a beam emitter for directing an emission at an intended location on the substrate, and a signal detector for determining a signal intensity value associated with the emission; wherein the signal intensity value is associated with a corrected substrate location, said corrected substrate location determined from the intended substrate location and a correction factor, said correction factor being a function of said intended substrate location.