公开(公告)号：US20240053602A1

公开(公告)日：2024-02-15

申请号：US18494673

申请日：2023-10-25

Applicant: Teledyne Micralyne Inc.

Inventor： Glen Fitzpatrick ,  Mary Seto

IPC: G02B26/08 ,  G01S7/481 ,  G02B26/10

CPC classification number: G02B26/0841 ,  G01S7/4817 ,  G02B26/105

Abstract: MEMs-based variable blazed gratings are provided for passive or active phase modulation and beam control in LIDAR among other applications. A system and method for modulating light uses a microelectromechanical structure having deformable diffractive elements. The light is directed to the diffractive elements which act to reflect the light as planar mirrors. Applying a predetermined electrostatic force corresponding to each diffractive element flexes each diffractive element independently from other diffractive elements. Each diffractive element is either flexed continuously through a range of deflected positions or held stably at a single deflected position to interfere with the light through phase changes imparted according to the laws of diffraction.