公开(公告)号：US20030019832A1

公开(公告)日：2003-01-30

申请号：US10076296

申请日：2002-02-13

Applicant: The Regents of the University of California

Inventor： Robert A. Conant ,  Jocelyn T. Nee ,  Kam-Yin Lau ,  Richard S. Muller

IPC: C23F001/00

CPC classification number: B81C1/00182 ,  B81B2201/042 ,  B81B2203/0136 ,  B81C2201/0178 ,  B81C2203/032 ,  G02B26/0841

Abstract: A staggered torsional electrostatic combdrive includes a stationary combteeth assembly and a moving combteeth assembly with a mirror and a torsional hinge. The moving combteeth assembly is positioned entirely above the stationary combteeth assembly by a predetermined vertical displacement during a combdrive resting state. A method of fabricating the staggered torsional electrostatic combdrive includes the step of deep trench etching a stationary combteeth assembly in a first wafer. A second wafer is bonded to the first wafer to form a sandwich including the first wafer, an oxide layer, and the second wafer. A moving combteeth assembly is formed in the second wafer. The moving combteeth assembly includes a mirror and a torsional hinge. The moving combteeth assembly is separated from the first wafer by the oxide layer. The oxide layer is subsequently removed to release the staggered torsional electrostatic combdrive.

Abstract translation: 交错的扭转静电梳状驱动器包括固定的组合组件和具有反射镜和扭转铰链的移动梳状组件。 移动的组合组件在梳齿装置静止状态期间完全位于固定组合组件上方预定的垂直位移。 制造交错扭转静电梳齿驱动器的方法包括在第一晶片中深沟槽蚀刻静止梳组件的步骤。 第二晶片结合到第一晶片以形成包括第一晶片，氧化物层和第二晶片的夹层。 在第二晶片中形成移动的组合组件。 移动的组合组件包括反射镜和扭转铰链。 移动的组合组件通过氧化物层与第一晶片分离。 随后去除氧化物层以释放交错的扭转静电梳状驱动。

公开(公告)号：US20020163053A1

公开(公告)日：2002-11-07

申请号：US10122451

申请日：2002-04-12

Applicant: The Regents of the University of California, a California corporation

Inventor： Behrang Behin ,  Kam Yin Lau ,  Richard S. Muller

IPC: H01L029/82

CPC classification number: G02B6/3566 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0816

Abstract: Cantilevered microstructure apparatus and methods are described. An exemplary cantilevered microstructure apparatus includes a base, a cantilever, and a stop. The cantilever may be coupled to the base through a flexure, so that the cantilever is movable between a first angular orientation and a second angular orientation. The stop may be configured to contact the bottom portion of the cantilever in a contact area when the cantilever is in the second angular orientation. Alternatively, the stop may be configured to contact the cantilever in a contact area sized so that, upon application of an electrostatic bias between the cantilever and the stop, a sufficient force holds the cantilever against the stop. Alternatively, the stop may have a substantially planar surface configured to contact the cantilever in a contact area sized so that, upon application of a force to the cantilever substantially normal to the substantially planar surface of the stop, a sufficient force holds the cantilever against the stop such that the cantilever lies in a plane substantially parallel to the substantially planar surface of the stop.

Abstract translation: 描述了悬臂微结构装置和方法。 示例性的悬臂微结构装置包括基座，悬臂和止动件。 悬臂可以通过挠曲件联接到基座，使得悬臂可在第一角度定向和第二角度定向之间移动。 当悬臂处于第二角度定向时，止动件可以构造成在接触区域中接触悬臂的底部。 或者，止动件可以被配置成在接触区域中接触悬臂，接触区域的大小使得当在悬臂和止挡件之间施加静电偏压时，足够的力将悬臂保持在止动件上。 或者，止挡件可以具有构造成在接触区域中接触悬臂的基本上平坦的表面，该接触区域的尺寸使得在基本上垂直于止动件的基本上平坦的表面施加到悬臂的力时，足够的力将悬臂抵抗 停止，使得悬臂位于基本上平行于止动件的基本上平坦的表面的平面中。