公开(公告)号：US20080242049A1

公开(公告)日：2008-10-02

申请号：US12058835

申请日：2008-03-31

Applicant: Denis JUNG ,  Christian DRABE ,  Thilo SANDNER ,  Harald SCHENK ,  Thomas KLOSE ,  Alexander WOLTER

Inventor： Denis JUNG ,  Christian DRABE ,  Thilo SANDNER ,  Harald SCHENK ,  Thomas KLOSE ,  Alexander WOLTER

IPC: H01L21/461

CPC classification number: B81C1/00103 ,  B81B2203/0384 ,  B81B2203/04

Abstract: In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.

Abstract translation: 在微机械结构的制造方法中，首先在基板上形成二维结构。 二维结构通过力的作用从基板平面偏转并在偏转状态下固定。

公开(公告)号：US20080164592A1

公开(公告)日：2008-07-10

申请号：US11971371

申请日：2008-01-09

Applicant: Thor BAKKE ,  Thilo SANDNER

Inventor： Thor BAKKE ,  Thilo SANDNER

IPC: H01L23/02 ,  H01L21/00

CPC classification number: B81B7/0067 ,  B81C2203/0118

Abstract: An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.

Abstract translation: 用于容纳微机械系统的装置包括其上形成有微机械系统的表面的基板，在基板的表面和透明盖之间布置的透明盖和干膜层布置。 干膜层布置具有开口，使得微机械系统邻接开口。

公开(公告)号：US20080165403A1

公开(公告)日：2008-07-10

申请号：US11968743

申请日：2008-01-03

Applicant: Thomas GRASSHOFF ,  Thomas KLOSE ,  Thilo SANDNER

Inventor： Thomas GRASSHOFF ,  Thomas KLOSE ,  Thilo SANDNER

IPC: G02B26/10 ,  G02B26/08 ,  H02N11/00

CPC classification number: G02B26/0841 ,  B81B3/0086 ,  H03H9/02338 ,  H03H9/02393 ,  H03H2009/02496 ,  H03H2009/02511 ,  H03H2009/02527

Abstract: A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.

Abstract translation: 所描述的微机械装置具有振荡体和弹性悬架的振荡系统，通过该摆动体振动体被振荡地悬挂。 弹性悬挂具有至少两个弹簧梁。 提供一种用于通过将弹性悬架的至少两个弹簧梁的位置彼此改变来调节振荡系统的谐振频率的调节器。

公开(公告)号：US20080218835A1

公开(公告)日：2008-09-11

申请号：US12038112

申请日：2008-02-27

Applicant: Thilo SANDNER ,  Harald SCHENK ,  Michael SCHOLLES ,  Markus SCHWARZENBERG ,  Alexander WOLTER

Inventor： Thilo SANDNER ,  Harald SCHENK ,  Michael SCHOLLES ,  Markus SCHWARZENBERG ,  Alexander WOLTER

IPC: G02B26/00

CPC classification number: G02B26/101 ,  H04N1/40037 ,  H04N9/3129 ,  H04N9/3155

Abstract: A projection apparatus for scanningly projecting an image onto an image field by means of a radiation beam includes a modulator for modulating an intensity of the radiation beam such that the intensity of the radiation beam changes in a time interval during which a scan point to which the radiation beam is directed sweeps a pixel of the image field.

Abstract translation: 用于通过辐射束将图像扫描地投影到图像场上的投影设备包括调制器，用于调制辐射束的强度，使得辐射束的强度在时间间隔内变化，在该时间间隔期间， 辐射束被定向扫描图像场的像素。

公开(公告)号：US20080240202A1

公开(公告)日：2008-10-02

申请号：US12058872

申请日：2008-03-31

Applicant: Jorg HEBER ,  Thomas KLOSE ,  Thilo SANDNER ,  Andreas BERGMANN ,  Christian GERWIG ,  Thomas KNIELING

Inventor： Jorg HEBER ,  Thomas KLOSE ,  Thilo SANDNER ,  Andreas BERGMANN ,  Christian GERWIG ,  Thomas KNIELING

IPC: G01J5/00

CPC classification number: G01J5/061 ,  G01J5/026 ,  G01J5/08 ,  G01J5/0809 ,  G02B7/008 ,  G02B26/0816

Abstract: A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.

Abstract translation: 微机械装置包括微机械功能结构和与微机械功能结构相关联的电磁辐射加热，其形成为在微机械功能结构中引起空间和时间上限定的温度或空间和时间上限定的温度过程。

公开(公告)号：US20080239531A1

公开(公告)日：2008-10-02

申请号：US12058855

申请日：2008-03-31

Applicant: Harald SCHENK ,  Thilo SANDNER

Inventor： Harald SCHENK ,  Thilo SANDNER

IPC: G02B7/182

CPC classification number: G02B26/0833 ,  G02B27/0018

Abstract: An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.

Abstract translation: 光学装置包括用于与入射在其上的电磁辐射相互作用的可偏转光学功能结构，以及与光学功能结构相关联并且对于电磁辐射至少部分透明的保护结构。 光学功能结构以相对于保护结构倾斜的方式布置，使得在光学功能结构的非偏转位置中，通过保护结构与光学功能结构相互作用的电磁辐射的主光束路径具有 相对于在保护结构处反射的电磁辐射的子光束路径的角度。

公开(公告)号：US20080239429A1

公开(公告)日：2008-10-02

申请号：US12058812

申请日：2008-03-31

Applicant: Thilo SANDNER

Inventor： Thilo SANDNER

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  B81B3/0021 ,  B81B2201/047 ,  B81B2203/058

Abstract: In a method of fabricating a micromechanical structure, first, a deflectably supported two-dimensional structure is formed in a substrate and, then, is arranged in a package such that an integrated micromanipulator is arranged between the package and the two-dimensional structure so as to effect a deflection of the two-dimensional structure out of a plane of the substrate.

Abstract translation: 在制造微机械结构的方法中，首先，在衬底中形成可偏转地支撑的二维结构，然后将其布置在封装中，使得集成显微操纵器布置在封装和二维结构之间，以便 以使二维结构偏离衬底的平面。