公开(公告)号：US06916009B2

公开(公告)日：2005-07-12

申请号：US10619391

申请日：2003-07-14

Applicant: Thomas Blecha

Inventor： Thomas Blecha

IPC: B65G49/00 ,  B01J3/00 ,  B01J3/02 ,  F16K51/02 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  F16K21/00

CPC classification number: H01L21/67092 ,  F16K51/02

Abstract: A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is arranged behind a plane which extends through the contact surface of the load-lock chamber and lies vertical to the axis of the input-side opening.

Abstract translation: 用于将基板引入真空室的装载锁定装置包括装载锁定室，其具有在输入侧上的至少一个开口，用于将基板从位于输入侧开口前方的气氛区域引入位于内部的内部空间 负载锁定室和输出侧的至少一个开口，用于将负载锁定室的内部空间连接到具有阀的真空室的内部空间; 至少一个真空门，其与输入侧上的相应开口相关联并且包括通过至少一个承载杆与驱动装置连通的关闭元件，并且可由驱动装置在输入 - 侧开口是打开的，并且其中输入侧开口关闭并且闭合元件接触到装载锁定室的接触表面的位置，其中，从位于输入侧开口前方的大气区域考虑， 驱动装置布置在延伸穿过装载锁定室的接触表面并垂直于输入侧开口的轴线的平面的后面。

公开(公告)号：US20110108750A1

公开(公告)日：2011-05-12

申请号：US13009147

申请日：2011-01-19

Applicant: Florian Ehrne ,  Thomas Blecha

Inventor： Florian Ehrne ,  Thomas Blecha

IPC: F16K3/316

CPC classification number: F16K3/314 ,  F16K3/188 ,  F16K51/02

Abstract: A mounting of a valve plate (1) on a valve rod (2) using a cross member (3) extending transversely with respect to the valve rod (2) is provided. The cross member (3) is connected at a central connecting point (4) to the valve rod (2) and is connected at least two lateral connecting points (5, 6), which are situated on both sides of the central connecting point (4), to the valve plate (1). The cross member (3) has a spacing (a) from the valve plate (1) in a central section (17) which comprises the central connecting point (4) and sections of the cross member (3) adjacent to the central connecting point (4) at both sides. By a twisting of the cross member (3), the valve plate (1) can be pivoted relative to the valve rod (2) about a pivot axis (19) which is at right angles to the valve rod.

Abstract translation: 提供了使用相对于阀杆（2）横向延伸的横向构件（3）将阀板（1）安装在阀杆（2）上。 横向构件（3）在中心连接点（4）处连接到阀杆（2），并且连接至少两个位于中心连接点两侧的横向连接点（5,6） 4）到阀板（1）。 横向构件（3）在中心部分（17）中具有与阀板（1）的间隔（a），其包括中心连接点（4）和与中心连接点相邻的横向构件（3）的部分 （4）两侧。 通过横向构件（3）的扭转，阀板（1）能够相对于阀杆（2）围绕与阀杆成直角的枢转轴线（19）枢转。

公开(公告)号：US09528614B2

公开(公告)日：2016-12-27

申请号：US14235409

申请日：2012-07-11

Applicant: Friedrich Geiser ,  Anton Neumeir ,  Berhard Duelli ,  Thomas Blecha ,  Karlheinz Summer

Inventor： Friedrich Geiser ,  Anton Neumeir ,  Berhard Duelli ,  Thomas Blecha ,  Karlheinz Summer

IPC: F16K3/30 ,  F16K3/18 ,  F16K51/02 ,  F16K3/314

CPC classification number: F16K3/30 ,  F16K3/18 ,  F16K3/314 ,  F16K51/02

Abstract: A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.

Abstract translation: 真空阀利用线性运动以气密方式封闭流动通道，并且包括封闭构件，封闭开口的阀壳体的第一密封表面和封闭构件的对应的第二密封表面。 在关闭位置，第二密封表面与第一密封表面密封接触。 在开口和第一密封表面之间的区域中，阀壳体包括封闭开口的第一倾斜表面，并且封闭构件包括相应的平行的第二倾斜表面。 倾斜表面相对于几何调节轴线具有3到15度之间的倾斜角度被定位成使得在关闭构件的关闭位置中，第二倾斜表面被布置在与第一倾斜表面相对的平行位置 距离为0和0.6毫米。

公开(公告)号：US20070257220A1

公开(公告)日：2007-11-08

申请号：US11744814

申请日：2007-05-04

Applicant: Bernhard LITSCHER ,  Thomas Blecha

Inventor： Bernhard LITSCHER ,  Thomas Blecha

IPC: F16K31/00

CPC classification number: F16K31/1226 ,  F16K3/0254 ,  F16K51/02

Abstract: The invention relates to a vacuum valve drive (1) for linear displacement of a valve closure (2) along an adjustment axis (3) between an opened position (A) of the vacuum valve (4) and a position (B) in which it is closed gas-tight, and to a vacuum valve (4) comprising the vacuum valve drive (1). The vacuum valve drive (1) comprises a drive housing (5) which contains a gas-tight working space (6), a piston (7) inside the working space (6), which divides the working space (6) into a first and a second pressure space (6a, 6b), and at least one connecting rod (8; 9) which is led from the working space (6) in a gas-tight manner to the valve closure (2). According to the invention, a static guide rod (11) which extends centrally and parallel to the adjustment axis (3) inside the working space (6) and is led through the piston (7), and a precision linear bearing (12) between the piston (7) and the guide rod (11), are provided. By means of the guide rod (11), the piston (7) is linearly guided with high precision and centred in the working space (6) so that the valve closure (2) coupled thereto is moved with high precision and pressed onto the valve seat (22), any particle generation by metal friction being avoided. In a further development, gas pressure is applied to the second pressure space (6b) via a channel (19) inside the guide rod (11).

Abstract translation: 本发明涉及一种真空阀驱动器（1），用于沿着调节轴线（3）在真空阀（4）的打开位置（A）和位置（B）之间线性移动阀门盖（2），在该位置 气密地封闭，并且包括真空阀驱动器（1）的真空阀（4）。 真空阀驱动器（1）包括驱动壳体（5），其包含气密工作空间（6），在工作空间（6）内部的活塞（7），其将工作空间（6）分成第一 和第二压力空间（6a，6b）以及至少一个连接杆（8; 9），其从所述工作空间（6）以气密方式被引导到所述阀盖（2）。 根据本发明，一种静态导杆（11），其在工作空间（6）内部中心并平行于调节轴线（3）延伸并被引导通过活塞（7）和精密直线轴承（12） 活塞（7）和导杆（11）。 通过导杆（11），活塞（7）以高精度线性地引导并且在工作空间（6）中居中，使得联接到其上的阀盖（2）以高精度移动并被压到阀 座椅（22），避免任何金属摩擦产生的颗粒物。 在进一步的发展中，通过导杆（11）内部的通道（19）将气体压力施加到第二压力空间（6b）。

公开(公告)号：US6056266A

公开(公告)日：2000-05-02

申请号：US175239

申请日：1998-10-20

Applicant: Thomas Blecha

Inventor： Thomas Blecha

IPC: F16K3/02 ,  F16K3/18 ,  F16K31/122 ,  F16K25/00

CPC classification number: F16K3/0218 ,  F16K3/188 ,  F16K31/122

Abstract: A device for closing an opening of a tank or a tubular conduit and including a plate for closing the opening and movable substantially perpendicular to a plane of the opening toward the opening to be pressed against a wall in which the opening is formed and away from the opening, and displaceable, in its position in which it is spaced from the opening, substantially parallel to the plane of the opening, first and second piston-cylinder units for displacing the closing plate parallel to the plane of the opening and perpendicular to the plane of the opening respectively, with each piston-cylinder unit having a housing with a cylinder bore and at least one piston displaceable in the cylinder bore relative to the housing, and conduits for communicating pressure medium to the cylinder bores of both piston-cylinder units for displacing respective pistons in respective bores.

Abstract translation: 一种用于关闭罐或管状导管的开口的装置，包括用于封闭开口的板，并且可基本上垂直于开口的平面移动朝向开口，以压靠开口形成并远离开口的壁 在其与开口间隔开的位置上大致平行于开口平面的第一和第二活塞 - 气缸单元，用于使封闭板平行于开口平面并垂直于平面移动; 分别具有每个活塞 - 气缸单元具有带有气缸孔的壳体和相对于壳体在气缸孔中可移位的至少一个活塞，以及用于将压力介质连通到两个活塞 - 气缸单元的气缸孔的导管，用于 在相应的孔中移动相应的活塞。

公开(公告)号：US20140158924A1

公开(公告)日：2014-06-12

申请号：US14235409

申请日：2012-07-11

Applicant: Friedrich Geiser ,  Anton Neumeir ,  Berhard Duelli ,  Thomas Blecha ,  Karlheinz Summer

Inventor： Friedrich Geiser ,  Anton Neumeir ,  Berhard Duelli ,  Thomas Blecha ,  Karlheinz Summer

IPC: F16K3/30

CPC classification number: F16K3/30 ,  F16K3/18 ,  F16K3/314 ,  F16K51/02

Abstract: A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.

Abstract translation: 真空阀利用线性运动以气密方式封闭流动通道，并且包括封闭构件，封闭开口的阀壳体的第一密封表面和封闭构件的对应的第二密封表面。 在关闭位置，第二密封表面与第一密封表面密封接触。 在开口和第一密封表面之间的区域中，阀壳体包括封闭开口的第一倾斜表面，并且封闭构件包括相应的平行的第二倾斜表面。 倾斜表面相对于几何调节轴线具有3到15度之间的倾斜角度被定位成使得在关闭构件的关闭位置中，第二倾斜表面被布置在与第一倾斜表面相对的平行位置 距离为0和0.6毫米。

公开(公告)号：US08672293B2

公开(公告)日：2014-03-18

申请号：US13119530

申请日：2009-09-21

Applicant: Florian Ehrne ,  Thomas Blecha

Inventor： Florian Ehrne ,  Thomas Blecha

IPC: F16K25/00 ,  F16K3/00

CPC classification number: F16K51/02 ,  F16K3/182

Abstract: A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15′, 16, 16′) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5). A bearing unit (17, 17′) is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall (1) and by which a guide unit (20, 20′) that displaceably guides the valve rod (12) in the longitudinal direction (6) is guided displaceably in the transverse direction (7).

Abstract translation: 一种真空阀，包括具有由阀座（4）围绕的阀开口（2）的壁（1），至少一个阀板（5），其设置在真空阀的真空区域中并且可以从 在纵向方向（6）处于中间位置的打开位置，以及从垂直于纵向方向（6）的横向（7）的中间位置到关闭位置。 承载阀板（5）的至少一个阀杆（12）被引导通过真空阀的真空区域，并且可以在平行于阀板（5）的纵向（6）上相对于壁（1）移位。 阀杆（12）的纵向轴线（14），以及横向（7）。 纵向和横向驱动装置（15,15'，16,16'）设置在真空阀的真空区域的外部，并且驱动装置可沿纵向方向（6）移动阀杆（12） 横向（7）以调节阀板（5）。 设置有一个轴承单元（17,17'），该轴承单元位于真空阀的真空区域的外部并且刚性地连接到壁（1）上，通过该轴承单元（20,20'）可移动地引导阀 沿纵向（6）的杆（12）沿横向（7）可移动地被引导。

公开(公告)号：US20050012066A1

公开(公告)日：2005-01-20

申请号：US10619391

申请日：2003-07-14

Applicant: Thomas Blecha

Inventor： Thomas Blecha

IPC: B65G49/00 ,  B01J3/00 ,  B01J3/02 ,  F16K51/02 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68 ,  F16K1/00

CPC classification number: H01L21/67092 ,  F16K51/02

Abstract: A load-lock device for introducing substrates into a vacuum chamber comprises a load-lock chamber with at least one opening on the input side for introducing the substrates from an atmosphere area located in front of the input-side opening into an interior space located inside the load-lock chamber, and at least one opening on the output side for connecting the interior space of the load-lock chamber to the interior space of a vacuum chamber with the intermediary of a valve; at least one vacuum door which is associated with a respective opening on the input side and which comprises a closure-element which communicates with a drive device via at least one carrier rod and is adjustable by the drive device between a position in which the input-side opening is open and a position in which the input-side opening is closed and in which the closure element contacts a contact surface of the load-lock chamber, wherein, considered from the atmosphere area located in front of the input-side opening, the drive device is arranged behind a plane which extends through the contact surface of the load-lock chamber and lies vertical to the axis of the input-side opening.

公开(公告)号：US5909867A

公开(公告)日：1999-06-08

申请号：US085431

申请日：1998-05-27

Applicant: Thomas Blecha

Inventor： Thomas Blecha

IPC: F16K3/02 ,  F16K27/04 ,  F16K51/02 ,  F16K3/314

CPC classification number: F16K27/044 ,  F16K3/0272

Abstract: A closing assembly for a chamber including, a housing-like member, a closing plate displaceable in the housing-like member for closing the chamber through-opening, and a drive unit for displacing the closing plate, with the housing-like member having two mutually perpendicular flange-like connection surfaces defining an angle of 90.degree. therebetween, and with attachment screws-receiving bores having their axis extending approximately parallel to the bisectrix of the angle formed by the two connection surfaces.

Abstract translation: 一种用于腔室的关闭组件，包括：壳体状构件，可在壳体状构件中移动以封闭腔室通孔的封闭板，以及用于移动闭合板的驱动单元，壳体状构件具有两个 相互垂直的法兰状连接表面在其间形成90°的角度，并且具有连接螺钉接收孔，其轴线大致平行于由两个连接表面形成的角度的等分线。

公开(公告)号：US08678344B2

公开(公告)日：2014-03-25

申请号：US13009147

申请日：2011-01-19

Applicant: Florian Ehrne ,  Thomas Blecha

Inventor： Florian Ehrne ,  Thomas Blecha

IPC: F16K3/314

CPC classification number: F16K3/314 ,  F16K3/188 ,  F16K51/02

Abstract: A mounting of a valve plate (1) on a valve rod (2) using a cross member (3) extending transversely with respect to the valve rod (2) is provided. The cross member (3) is connected at a central connecting point (4) to the valve rod (2) and is connected at least two lateral connecting points (5, 6), which are situated on both sides of the central connecting point (4), to the valve plate (1). The cross member (3) has a spacing (a) from the valve plate (1) in a central section (17) which comprises the central connecting point (4) and sections of the cross member (3) adjacent to the central connecting point (4) at both sides. By a twisting of the cross member (3), the valve plate (1) can be pivoted relative to the valve rod (2) about a pivot axis (19) which is at right angles to the valve rod.

Abstract translation: 提供了使用相对于阀杆（2）横向延伸的横向构件（3）将阀板（1）安装在阀杆（2）上。 横向构件（3）在中心连接点（4）处连接到阀杆（2），并且连接至少两个位于中心连接点两侧的横向连接点（5,6） 4）到阀板（1）。 横向构件（3）在中心部分（17）中具有与阀板（1）的间隔（a），其包括中心连接点（4）和与中心连接点相邻的横向构件（3）的部分 （4）两侧。 通过横向构件（3）的扭转，阀板（1）能够相对于阀杆（2）围绕与阀杆成直角的枢转轴线（19）枢转。