公开(公告)号：US20220216073A1

公开(公告)日：2022-07-07

申请号：US17646571

申请日：2021-12-30

Applicant: Tokyo Electron Limited

Inventor： Kiyoshi Mori ,  Takayuki Yamagishi

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

Abstract: A processing module includes: a processing container including therein processing spaces in which stages are disposed, respectively, wherein a center of each of the processing spaces is located on a same circumference; a rotation arm including holders configured to hold wafers, which are placed on the stages of the processing spaces, respectively, wherein the rotation arm is rotatable around a center of the circumference as a rotation axis; and a sensor located between adjacent processing spaces and configured to detect positions of the wafers held by the rotation arm during rotational operation of the rotation arm.

公开(公告)号：US12080523B2

公开(公告)日：2024-09-03

申请号：US17444680

申请日：2021-08-09

Applicant: Tokyo Electron Limited

Inventor： Kiyoshi Mori

IPC: H01J37/32 ,  H01J37/244

CPC classification number: H01J37/32513 ,  H01J37/244 ,  H01J37/32715 ,  H01J2237/2006 ,  H01J2237/20285 ,  H01J2237/3321 ,  H01J2237/334

Abstract: The present disclosure relates to a vacuum processing apparatus. The vacuum processing apparatus includes a processing container capable of maintaining an inside thereof in a vacuum atmosphere, a stage provided in the processing container and on which a substrate is placed, a support member passing through an opening formed at a bottom of the processing container to support the stage from below, a holder part located outside the processing container, a flange part arranged around the opening on the outside of the processing container, and a sealing part configured to be expandable and contractible and provided inside the spherical bearing along the circumferential direction of the opening so as to airtightly seal at least a space between the flange part and the holder part.

公开(公告)号：US11244810B2

公开(公告)日：2022-02-08

申请号：US16872778

申请日：2020-05-12

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kiyoshi Mori ,  Yuki Osada ,  Jun Nakagomi ,  Yoshiyuki Harima

IPC: H01J37/32 ,  H05H1/46

Abstract: An electric field sensor includes a probe, a cylindrical probe guide, an insulating member, a preload spring and a connector. The probe serves as an inner conductor of a coaxial transmission path and has a portion forming a monopole antenna at a tip end to be in constant contact with a microwave transmission window by a pressing force of a built-in spring thereof. The probe guide is disposed at an outer side of the probe and serves as an outer conductor of the coaxial transmission path. The insulating member is disposed between the probe and the probe guide. The preload spring preloads the probe guide downward and presses the probe guide so that the tip end of the probe guide comes in constant contact with the planar slot antenna. The connector is connected to the probe and the probe guide to connect coaxial signal cables for extracting signals.

公开(公告)号：US12183603B2

公开(公告)日：2024-12-31

申请号：US17646571

申请日：2021-12-30

Applicant: Tokyo Electron Limited

Inventor： Kiyoshi Mori ,  Takayuki Yamagishi

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

Abstract: A processing module includes: a processing container including therein processing spaces in which stages are disposed, respectively, wherein a center of each of the processing spaces is located on a same circumference; a rotation arm including holders configured to hold wafers, which are placed on the stages of the processing spaces, respectively, wherein the rotation arm is rotatable around a center of the circumference as a rotation axis; and a sensor located between adjacent processing spaces and configured to detect positions of the wafers held by the rotation arm during rotational operation of the rotation arm.

公开(公告)号：US12165908B2

公开(公告)日：2024-12-10

申请号：US17304973

申请日：2021-06-29

Applicant: Tokyo Electron Limited

Inventor： Kiyoshi Mori

IPC: H01L21/687 ,  B25J21/00 ,  H01L21/677

Abstract: The present disclosure reduces deviation in the position and inclination of a stage due to the deformation of a processing container. A vacuum processing apparatus includes a processing container configured to be capable of maintaining an inside thereof in a vacuum atmosphere, a stage provided in the processing container such that a substrate is placed thereon, a support member passing through a hole in the bottom of the processing container to support the stage from the bottom side, a base member engaged with an end portion of the support member located outside the processing container to be movable integrally with the stage, and a plurality of actuators provided in parallel with each other between the bottom of the processing container and the base member and configured to adjust a position and an inclination of the stage by moving the base member relative to the bottom of the processing container.

公开(公告)号：US12148637B2

公开(公告)日：2024-11-19

申请号：US17577503

申请日：2022-01-18

Applicant: Tokyo Electron Limited

Inventor： Kiyoshi Mori ,  Satoru Kawakami

IPC: H01L21/67 ,  C23C16/44 ,  H01L21/677 ,  H01L21/687

Abstract: A substrate processing apparatus includes a vacuum processing container and a rotation arm including a rotary axis disposed at a central portion of the vacuum processing container, wherein, in the rotation arm, a rotation cylinder having a hollow interior constitutes the rotary axis, and a hollow portion of the rotation cylinder constitutes an exhaust path of the vacuum processing container.

公开(公告)号：US12068662B2

公开(公告)日：2024-08-20

申请号：US17447221

申请日：2021-09-09

Applicant: Tokyo Electron Limited

Inventor： Kiyoshi Mori

IPC: H02K7/14 ,  C23C16/458 ,  C23C16/50

CPC classification number: H02K7/14 ,  C23C16/4584 ,  C23C16/50

Abstract: A rotary mechanism connects a first rotary part and a second rotary part, without using a coupling and while allowing an installation error between the first rotary part and the second rotary part. A rotation body includes a first rotary part and a first fixed part. A flat plate is fixed to the first fixed part of the rotation body and has rigidity in a rotating direction of the first rotary part and flexibility in an axial direction for the rotating direction. A motor includes a second rotary part coaxially fixed to the first rotary part of the rotation body and a second fixed part fixed to the flat plate.