公开(公告)号：US20180257101A1

公开(公告)日：2018-09-13

申请号：US15911375

申请日：2018-03-05

Applicant: Tokyo Electron Limited

Inventor： Kazuhito MIYAZAKI ,  Akira KAKINO ,  Wataru YOSHITOMI

IPC: B05C11/00 ,  B05D1/26 ,  B05C5/02 ,  G01B11/00

CPC classification number: B05C11/00 ,  B05C5/0216 ,  B05D1/26 ,  B41J11/0095 ,  B41J11/06 ,  B41J11/42 ,  G01B11/002 ,  H01J9/02 ,  H01L21/681 ,  H01L22/12 ,  H01L27/1292 ,  H01L51/0004 ,  H01L51/0005 ,  H01L51/5012 ,  H01L51/5056 ,  H01L51/5072 ,  H01L51/5088 ,  H01L51/5092 ,  H01L51/56

Abstract: Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.

公开(公告)号：US20180261472A1

公开(公告)日：2018-09-13

申请号：US15911539

申请日：2018-03-05

Applicant: Tokyo Electron Limited

Inventor： Kazuhito MIYAZAKI ,  Akira KAKINO ,  Wataru YOSHITOMI

IPC: H01L21/67 ,  G02F1/1335 ,  H05K3/10 ,  H05B33/10 ,  G02F1/137 ,  B41J2/17 ,  B41J2/04

CPC classification number: H01L21/6715 ,  B41J2/04 ,  B41J2/1714 ,  B41J2/2135 ,  G02F1/1335 ,  G02F1/137 ,  H05B33/10 ,  H05K3/10

Abstract: A control unit obtains a captured image of a reference workpiece by a second image capturing unit after a droplet ejected from a droplet ejecting head lands toward a reference mark formed on an upper surface of the reference workpiece, detects a positional deviation amount of a position of the reference mark and a landing position of the droplet based on the captured image, and calculates the correction amounts of the relative positions of a workpiece table and a droplet ejecting head based on the positional deviation amount.