公开(公告)号：US20210010932A1

公开(公告)日：2021-01-14

申请号：US16095771

申请日：2017-04-28

Applicant: Tokyo Institute of Technology

Inventor： Yukio KAWANO ,  Daichi SUZUKI

IPC: G01N21/3586 ,  G01J3/42 ,  G01J5/04 ,  H01L51/00

Abstract: A terahertz wave detection device includes a low-dimensional electron system material formed on a substrate; and a first electrode and a second electrode opposingly arranged on a two-dimensional plane of the low-dimensional electron system material. The first electrode and the second electrode are made of metals having different thermal conductivity. An 8-element array sensor includes eight terahertz wave detection devices aligned in an array. The terahertz wave detection device includes carbon nanotube film; a first electrode disposed on one side of the carbon nanotube film; and a second electrode disposed on the other side of the carbon nanotube film. The first electrode and the second electrode have different thermal conductivity.