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公开(公告)号:US20230270017A1
公开(公告)日:2023-08-24
申请号:US17703967
申请日:2022-03-24
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Hung-Yi Wu , Jia-Rong Wu , Yu-Hsiang Lin , Yi-Wen Chen , Kun-Sheng Yang
IPC: H01L43/12 , H01L21/308
CPC classification number: H01L43/12 , H01L21/308
Abstract: A method for fabricating a semiconductor device includes the steps of forming a magnetic tunneling junction (MTJ) on a substrate, forming a spin orbit torque (SOT) layer on the MTJ, forming an inter-metal dielectric (IMD) layer around the MTJ and the SOT layer, forming a first hard mask on the IMD layer, forming a semiconductor layer on the first hard mask, and then patterning the first hard mask.
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公开(公告)号:US20240347583A1
公开(公告)日:2024-10-17
申请号:US18195905
申请日:2023-05-10
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kun-Sheng Yang , Yi-Wen Chen , Hung-Yi Wu , YI CHUEN ENG , Yu-Hsiang Lin
IPC: H01L29/06 , H01L27/088
CPC classification number: H01L29/0603 , H01L27/0886
Abstract: A semiconductor device includes a substrate having a medium-voltage (MV) region and a logic region, a gate structure on the MV region, a first single diffusion break (SDB) structure and a second SDB structure in the substrate directly under the gate structure, and a source/drain region adjacent to two sides of the gate structure. Preferably, top surfaces of the first SDB structure and the second SDB structure are coplanar, bottom surfaces of the first SDB structure and the second SDB structure are coplanar, and the first SDB structure and the second SDB structure are made of same material.
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