公开(公告)号：US08755646B2

公开(公告)日：2014-06-17

申请号：US13947119

申请日：2013-07-22

Applicant: United Microelectronics Corp.

Inventor： Yi-Ching Wu ,  Shuenn-Jeng Chen

IPC: G02B6/12

CPC classification number: G02B6/13 ,  G02B6/12004 ,  G02B6/1228 ,  G02B6/136

Abstract: A method of fabricating an optical transformer is provided. A substrate is provided first, wherein the substrate includes a first region and a second region. Then a first material layer is formed on the substrate, and the portion of the first material layer other than in the first region is removed. Then a second material layer is formed on the substrate, and the portion of the second material layer in the first region and the second region is removed. Lastly, a first conductive layer is formed on the substrate and the portion of the first conductive layer other than in the second region is removed to make the first material layer, the second material layer and the first conductive layer have the same height such that the first material layer becomes a part of the optical transformer. The present invention further provides a semiconductor structure.

Abstract translation: 提供一种制造光变换器的方法。 首先提供衬底，其中衬底包括第一区域和第二区域。 然后在基板上形成第一材料层，除去除了第一区域之外的第一材料层的部分。 然后在基板上形成第二材料层，并且去除第一区域和第二区域中的第二材料层的部分。 最后，在基板上形成第一导电层，除去除了第二区域以外的第一导电层的部分，使第一材料层，第二材料层和第一导电层具有相同的高度，使得 第一材料层成为光变换器的一部分。 本发明还提供一种半导体结构。

公开(公告)号：US20130308899A1

公开(公告)日：2013-11-21

申请号：US13947119

申请日：2013-07-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yi-Ching Wu ,  Shuenn-Jeng Chen

IPC: G02B6/13

CPC classification number: G02B6/13 ,  G02B6/12004 ,  G02B6/1228 ,  G02B6/136

Abstract: A method of fabricating an optical transformer is provided. A substrate is provided first, wherein the substrate includes a first region and a second region. Then a first material layer is formed on the substrate, and the portion of the first material layer other than in the first region is removed. Then a second material layer is formed on the substrate, and the portion of the second material layer in the first region and the second region is removed. Lastly, a first conductive layer is formed on the substrate and the portion of the first conductive layer other than in the second region is removed to make the first material layer, the second material layer and the first conductive layer have the same height such that the first material layer becomes a part of the optical transformer. The present invention further provides a semiconductor structure.

Abstract translation: 提供一种制造光变换器的方法。 首先提供衬底，其中衬底包括第一区域和第二区域。 然后在基板上形成第一材料层，除去除了第一区域之外的第一材料层的部分。 然后在基板上形成第二材料层，并且去除第一区域和第二区域中的第二材料层的部分。 最后，在基板上形成第一导电层，除去除了第二区域以外的第一导电层的部分，使第一材料层，第二材料层和第一导电层具有相同的高度，使得 第一材料层成为光变换器的一部分。 本发明还提供一种半导体结构。