-
公开(公告)号:US20250072080A1
公开(公告)日:2025-02-27
申请号:US18372684
申请日:2023-09-25
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chang-Yih Chen , Yi-Wen Chen , Chia-Chen Sun , Wei-Chung Sun , Wan-Ching Lee
IPC: H01L29/66 , H01L21/8238 , H01L27/092 , H01L29/08
Abstract: A method for fabricating a semiconductor device includes the steps of first forming a gate structure on a substrate, forming a first spacer on the gate structure, forming a patterned mask on the gate structure and one side of the gate structure, removing the first spacer on another side of the gate structure, and then forming a source/drain region adjacent to two sides of the gate structure.