公开(公告)号：US20230152473A1

公开(公告)日：2023-05-18

申请号：US17916165

申请日：2021-03-30

Applicant: UNIVERSITÄT HAMBURG

Inventor： Robert BLICK ,  Stefanie HAUGG ,  Robert ZIEROLD

IPC: G01T1/16 ,  H01J43/24 ,  H01J9/02 ,  B33Y80/00 ,  B33Y10/00 ,  B29C64/124

CPC classification number: G01T1/16 ,  B29C64/124 ,  B33Y10/00 ,  B33Y80/00 ,  H01J9/02 ,  H01J43/246 ,  B29L2031/40

Abstract: A microchannel sensor for detecting radiation and/or particles, the microchannel sensor comprising at least one sensor substrate, wherein said sensor substrate comprises a plurality of channels extending from a first side of the substrate to an opposite side of the substrate, wherein said channels are arranged along a channel axis which is tilted relative a normal axis of said substrate, and wherein said plurality of channels comprise a first set of channels with a first cross section and a second set of channels with a second cross section being different from said first cross section.

公开(公告)号：US20230191691A1

公开(公告)日：2023-06-22

申请号：US17916160

申请日：2021-03-30

Applicant: UNIVERSITÄT HAMBURG

Inventor： Robert BLICK ,  Stefanie HAUGG ,  Robert ZIEROLD

IPC: B29C64/135 ,  B29C64/176 ,  B29C64/264 ,  B29C64/393

CPC classification number: B29C64/135 ,  B29C64/176 ,  B29C64/264 ,  B29C64/393 ,  B33Y10/00

Abstract: A method of step-wise exposing a voxel of a resist to radiation for forming a three-dimensional structure, the method comprising setting a step size to a first resolution; setting a voxel volume to a first volume; exposing a first set of voxels of said first volume to radiation using said first resolution; setting the step size to a second resolution being smaller than said first resolution, or, respectively, greater than said first resolution; setting the voxel volume to a second volume being smaller than said first volume, or, respectively, greater than said first volume; and exposing a second set of voxels of said second volume to radiation using said second resolution.