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公开(公告)号:US10384230B2
公开(公告)日:2019-08-20
申请号:US15537545
申请日:2015-12-14
Applicant: UNIVERSITÄT ULM
Inventor: Steffen Strehle , Daniel Markus Rosskopf , Andreas Magnus Probst
Abstract: The invention relates to a method for producing a substrate structured by nanowires, characterized in that no lubricant and no lithographic resist mask is used in the method, and only by moving a donor substrate having nanowires relative to a substrate and by locally tribological properties on the surface of the substrate, a specified number of nanowires is deposited selectively at locally defined points of the substrate. The invention further relates to a substrate that can be produced using the method according to the invention, and which selectively contains a specified number of nanowires on a surface at locally defined points. The invention further relates to the use of the substrate according to the invention in microelectronics, microsystems technology, and/or micro-sensor systems.