Metasurfaces for high-efficient IR photodetectors

    公开(公告)号:US12094899B2

    公开(公告)日:2024-09-17

    申请号:US17333847

    申请日:2021-05-28

    CPC classification number: H01L27/1462 H01L27/14685

    Abstract: A semiconductor-based sensor with enhanced light absorption, and in particular, enhanced infrared light absorption includes a semiconductor light sensor element and a patterned spatially inhomogeneous dielectric layer disposed over the semiconductor light sensor element. Characteristically, spatial inhomogeneity of the patterned spatially inhomogeneous dielectric layer is optimized to provide a maximized electric field in the semiconductor light sensor element such light absorption is enhanced.

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