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公开(公告)号：US3538597A
公开(公告)日：1970-11-10
申请号：US3538597D
申请日：1967-07-13
Applicant: US NAVY
Inventor： LEINKRAM CHARLES Z , SHIMKUS MICHAEL A
IPC: H01L21/50 , H01L23/047 , H01L23/10 , B01J17/00 , H01J7/02
CPC classification number: H01L23/10 , H01L21/50 , H01L23/047 , H01L2924/0002 , H01L2924/00
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