公开(公告)号：US20160146722A1

公开(公告)日：2016-05-26

申请号：US14937444

申请日：2015-11-10

Applicant: Universität Stuttgart

Inventor： Klaus Koerner ,  Arnulf Roeseler ,  Daniel Claus ,  Wolfgang Osten

IPC: G01N21/21 ,  G01B9/02 ,  G01N21/65

CPC classification number: G01N21/211 ,  G01B9/02091 ,  G01N21/65 ,  G01N2021/212 ,  G01N2021/213

Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).

Abstract translation: 本文公开了一种用于光谱椭偏仪的装置，优选用于红外光谱椭偏仪，以及使用该装置的光谱椭偏仪的方法。 在一些实施例中，该装置可以包括光源（12），检测器（30），偏振器（40），分析器（41）和测量探针（10）。 在一个实施例中，测量探针可以包括具有至少一个第一表面的至少一个第一表面的ATR棱镜（50），所述至少一个第一表面具有至少一个测量部分（M），其被配置为与测量对象（72）进行光学接触，以及至少一个第二 表面具有至少一个反射部分（RX）。

公开(公告)号：US09383306B2

公开(公告)日：2016-07-05

申请号：US14937444

申请日：2015-11-10

Applicant: Universität Stuttgart

Inventor： Klaus Koerner ,  Arnulf Roeseler ,  Daniel Claus ,  Wolfgang Osten

IPC: G01J3/447 ,  G01N21/21 ,  G01N21/65 ,  G01B9/02

CPC classification number: G01N21/211 ,  G01B9/02091 ,  G01N21/65 ,  G01N2021/212 ,  G01N2021/213

Abstract: Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).