公开(公告)号：US20240014001A1

公开(公告)日：2024-01-11

申请号：US18257213

申请日：2021-01-29

Applicant: University Of Science And Technology Of China

Inventor： Hongmin Zhou ,  Shengquan Fu ,  Ming Li

IPC: H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  H01J37/28 ,  H01J2237/204

Abstract: A system of scanning electron microscope sample box and a method of opening the same are provided, including: a sample chamber (1); an exchange chamber (2) communicated with the sample chamber (1), a sample stage base (3) is disposed in the exchange chamber (2), the sample stage base (3) is subjected to an external force to be translated from the exchange chamber (2) to the sample chamber (1), and an inner wall of the exchange chamber (2) is provided with a pulling arm (4); and a sample box including a box body (5) and a box cover (6) sealing the box body (5), wherein the box body (5) is placed on the sample stage base (3) of the exchange chamber (2), and the box cover (6) is connected to the pulling arm (4), so that the box body (5) is separated from the box cover (6) when the sample stage base (3) is subjected to the external force to translate the box body (5) from the exchange chamber (2) to the sample chamber (1). The method of opening the scanning electron microscope sample box provided by the present disclosure is simple and is easy for implementation, reducing a difficulty and a cost of a process of manufacturing the sample box.