公开(公告)号：US20140126591A1

公开(公告)日：2014-05-08

申请号：US14151176

申请日：2014-01-09

Applicant: V TECHNOLOGY CO., LTD.

Inventor： Koichi KAJIYAMA ,  Michinobu Mizumura ,  Tetsuya Kiguchi ,  Daisuke Ishii ,  Yoshikatsu Yanagawa ,  Masami Takimoto

IPC: H01S3/11

CPC classification number: H01S3/11 ,  H01S3/005 ,  H01S3/08054 ,  H01S3/092 ,  H01S3/10038 ,  H01S3/107 ,  H01S3/115 ,  H01S3/1611 ,  H01S3/1643 ,  H01S3/2308

Abstract: A pulsed laser oscillator includes at least one first electrooptical element that polarizes light according to an applied voltage and a voltage control unit that applies a voltage to the first electrooptical element and controls the voltage. The voltage control unit changes over time a voltage value applied to the first electrooptical element, to control a pulse width of laser light.

Abstract translation: 脉冲激光振荡器包括至少一个根据施加的电压使光偏振的第一电光元件和向第一电光元件施加电压并控制电压的电压控制单元。 电压控制单元随时间变化施加到第一电光元件的电压值，以控制激光的脉冲宽度。

公开(公告)号：US09054494B2

公开(公告)日：2015-06-09

申请号：US14151176

申请日：2014-01-09

Applicant: V TECHNOLOGY CO., LTD.

Inventor： Koichi Kajiyama ,  Michinobu Mizumura ,  Tetsuya Kiguchi ,  Daisuke Ishii ,  Yoshikatsu Yanagawa ,  Masami Takimoto

IPC: H01S3/10 ,  H01S3/11 ,  H01S3/107 ,  H01S3/08 ,  H01S3/115 ,  H01S3/092 ,  H01S3/16 ,  H01S3/23 ,  H01S3/00

CPC classification number: H01S3/11 ,  H01S3/005 ,  H01S3/08054 ,  H01S3/092 ,  H01S3/10038 ,  H01S3/107 ,  H01S3/115 ,  H01S3/1611 ,  H01S3/1643 ,  H01S3/2308

Abstract: A pulsed laser oscillator includes at least one first electrooptical element that polarizes light according to an applied voltage and a voltage control unit that applies a voltage to the first electrooptical element and controls the voltage. The voltage control unit changes over time a voltage value applied to the first electrooptical element, to control a pulse width of laser light.

Abstract translation: 脉冲激光振荡器包括至少一个根据施加的电压使光偏振的第一电光元件和向第一电光元件施加电压并控制电压的电压控制单元。 电压控制单元随时间变化施加到第一电光元件的电压值，以控制激光的脉冲宽度。

公开(公告)号：US20160002088A1

公开(公告)日：2016-01-07

申请号：US14765233

申请日：2014-02-03

Applicant: V TECHNOLOGY CO., LTD.

Inventor： Michinobu Mizumura ,  Masami Takimoto ,  Shota Matsuyama

IPC: C03B33/10 ,  G02B7/02 ,  C03C23/00 ,  G02B19/00

CPC classification number: C03B33/102 ,  B23K26/0734 ,  B23K26/0823 ,  C03B33/0222 ,  C03B33/04 ,  C03C23/0025 ,  G02B7/02 ,  G02B19/0009 ,  G02B26/10 ,  G02B27/0927 ,  G02B27/0933 ,  G02B27/0955

Abstract: A laser processing apparatus that condenses a laser beam into an annular shape to irradiate the condensing position of the laser beam within a thickness range of a substrate, and shifts the condensing position in such a manner that the center of the condensing position that is annular moves in a circular manner, at a stage of shifting the condensing position in a thickness direction of the substrate and a planar direction of the substrate.

Abstract translation: 一种激光处理装置，其将激光束冷凝成环状，以在基板的厚度范围内照射激光束的聚光位置，并且以使得环状的聚光位置的中心移动的方式移动聚光位置 以圆形的方式，在基板的厚度方向上的聚光位置和基板的平面方向移动的阶段。