公开(公告)号：US20240339910A1

公开(公告)日：2024-10-10

申请号：US18663918

申请日：2024-05-14

Applicant: VDL Enabling Technologies Group B.V.

Inventor： Johannes Hubertus Antonius VAN DE RIJDT ,  Francesco PATTI ,  Jorrit Fedde BLOEMHOF ,  Rob Antonius Andries VERKOOIJEN ,  Bob VAN NINHUIJS ,  Roel Adrianus Jacobus VAN MIL

IPC: H02K41/03 ,  B65G54/02 ,  G03F7/00 ,  H01L21/677 ,  H01L21/68

CPC classification number: H02K41/031 ,  B65G54/02 ,  G03F7/70758 ,  G03F7/70816 ,  H01L21/67709 ,  H01L21/68 ,  H02K2201/18

Abstract: The invention relates to an actuator device for use in a positioning system, wherein the actuator device is linearly movable within a plane with respect to a supporting structure of the positioning system as well as such a positioning system implementing such an actuator device.
In an example of the actuator device according to the invention, it comprises a carrier having a longitudinal and a transversal dimension; and multiple groups of coil assemblies mounted in the carrier, each group of coil assemblies being structured to orientate the carrier in at least one degree of freedom.
The single design actuator device according to the invention has limited constructional dimensions and allows high accuracy as to motion and position in multiple degrees of freedom.

公开(公告)号：US20250116499A1

公开(公告)日：2025-04-10

申请号：US18730281

申请日：2023-02-01

Applicant: VDL ENABLING TECHNOLOGIES GROUP B.V.

Inventor： Francesco PATTI ,  Johannes Hubertus Antonius VAN DE RIJDT

IPC: G01B9/02017 ,  G01B9/02015 ,  G01B11/00

Abstract: According to the disclosure, a position detection system using laser light interferometry is proposed, capable of measuring the positions and displacements of an object relative to and within an XYZ system of coordinates, the system using a holder comprising a mounting surface for the object, the mounting surface being oriented in the XY plane of the XYZ system of coordinates, several X, Y and Z measuring mirrors as well as a plurality of X, Y, and Z optical devices, each optical device structured to emit and direct an X, Y or Z laser light beam to and from a respective X, Y or Z measuring mirror and structured to detect and convert at least part of the X, Y or Z laser light beams reflected by the respective X, Y or Z measuring mirrors into electric measuring signals, the electric measuring signals comprising at least information as to the X, Y and Z position of the object, wherein, for measuring the Z position of the object, the at least one Y laser light beam is directed parallel to the XY plane to and from a Y measuring mirror positioned perpendicular to the XY plane and the at least one Z laser light beam is directed under an angle α relative to the XY plane to and from a Z measuring mirror.
By directing the Y laser light beam parallel to the XY plane to and from a Y measuring mirror positioned perpendicular to the XY plane and directing the Z laser light beam under an angle α relative to the XY plane to and from a Z measuring mirror, the optics of the position detection system can be simplified as any additional Z measuring mirror can be obviated. Particularly, this results in less occupied work volume in the direct vicinity where semiconductor and integrated circuit manufacturing processes.