公开(公告)号：US20240339910A1

公开(公告)日：2024-10-10

申请号：US18663918

申请日：2024-05-14

Applicant: VDL Enabling Technologies Group B.V.

Inventor： Johannes Hubertus Antonius VAN DE RIJDT ,  Francesco PATTI ,  Jorrit Fedde BLOEMHOF ,  Rob Antonius Andries VERKOOIJEN ,  Bob VAN NINHUIJS ,  Roel Adrianus Jacobus VAN MIL

IPC: H02K41/03 ,  B65G54/02 ,  G03F7/00 ,  H01L21/677 ,  H01L21/68

CPC classification number: H02K41/031 ,  B65G54/02 ,  G03F7/70758 ,  G03F7/70816 ,  H01L21/67709 ,  H01L21/68 ,  H02K2201/18

Abstract: The invention relates to an actuator device for use in a positioning system, wherein the actuator device is linearly movable within a plane with respect to a supporting structure of the positioning system as well as such a positioning system implementing such an actuator device.
In an example of the actuator device according to the invention, it comprises a carrier having a longitudinal and a transversal dimension; and multiple groups of coil assemblies mounted in the carrier, each group of coil assemblies being structured to orientate the carrier in at least one degree of freedom.
The single design actuator device according to the invention has limited constructional dimensions and allows high accuracy as to motion and position in multiple degrees of freedom.