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公开(公告)号：US11015982B2
公开(公告)日：2021-05-25
申请号：US16818652
申请日：2020-03-13
Applicant: Wisconsin Alumni Research Foundation
Inventor： Zongfu Yu , Soongyu Yi , Dianjing Liu
IPC: G01B9/02 , G01J9/02 , H01L27/146
Abstract: A wavefront sensor system suitable for integration into an integrated circuit light detector may provide for wave angle sensors having varying functional relationships between the wave angle and signal to provide improved dynamic range. These wave angle sensors may be combined with integrated circuit phase angle sensors for a more complete analysis of the waveform.
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