公开(公告)号：US11015982B2

公开(公告)日：2021-05-25

申请号：US16818652

申请日：2020-03-13

Applicant: Wisconsin Alumni Research Foundation

Inventor： Zongfu Yu ,  Soongyu Yi ,  Dianjing Liu

IPC: G01B9/02 ,  G01J9/02 ,  H01L27/146

Abstract: A wavefront sensor system suitable for integration into an integrated circuit light detector may provide for wave angle sensors having varying functional relationships between the wave angle and signal to provide improved dynamic range. These wave angle sensors may be combined with integrated circuit phase angle sensors for a more complete analysis of the waveform.

公开(公告)号：US20200371043A1

公开(公告)日：2020-11-26

申请号：US16417186

申请日：2019-05-20

Applicant: Wisconsin Alumni Research Foundation

Inventor： Soongyu Yi ,  Zongfu Yu

IPC: G01N21/88 ,  G01N21/17 ,  G02B27/00

Abstract: An apparatus for measurement of surface relief provides a phase sensitive camera and processing to reconstruct a wavefront profile matching the surface when illuminated with a known light source thereby providing noncontact surface relief measurements.

公开(公告)号：US11231375B2

公开(公告)日：2022-01-25

申请号：US16417186

申请日：2019-05-20

Applicant: Wisconsin Alumni Research Foundation

Inventor： Soongyu Yi ,  Zongfu Yu

IPC: G01N21/88 ,  G01N21/17 ,  G02B27/00 ,  G01B11/26

Abstract: An apparatus for measurement of surface relief provides a phase sensitive camera and processing to reconstruct a wavefront profile matching the surface when illuminated with a known light source thereby providing noncontact surface relief measurements.