公开(公告)号：US09541493B2

公开(公告)日：2017-01-10

申请号：US14724932

申请日：2015-05-29

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Yoshinori Matsumoto ,  Takashi Tsubota ,  Toyoaki Hamaguchi ,  Akishige Ito

IPC: G01N21/21 ,  G01N21/84 ,  G01N21/89 ,  G01N21/88

CPC classification number: G01N21/21 ,  G01N21/8422 ,  G01N21/8851 ,  G01N21/8901 ,  G01N2021/8848 ,  G01N2201/0612 ,  G01N2201/062

Abstract: An inspection apparatus using polarized lights according to one aspect of the present invention includes an irradiator configured to irradiate an inspection target with a first plurality of lights. The first plurality of lights have different polarization states and different wavelengths from each other. The inspection apparatus further includes a light receiver configured to perform a wavelength demultiplexing of a second plurality of lights obtained from the inspection target to generate a third plurality of lights, to separately receive the third plurality of lights, and to output at least one light-receiving signal associated with the third plurality of lights and a processor configured to calculate at least one of an ellipse azimuth, a degree of polarization, and a polarization component intensity using the light-receiving signal and to determine whether the inspection target is defective or non-defective.

Abstract translation: 根据本发明的一个方面的使用偏振光的检查装置包括被配置为用第一多个光照射检查对象的照射器。 第一组多个光具有彼此不同的偏振态和不同的波长。 检查装置还包括：受光器，被配置为对从检查对象获得的第二多个光进行波长解复用以产生第三多个光，以分别接收第三多个光，并且输出至少一个发光元件， 接收与所述第三多个灯相关联的信号;以及处理器，其被配置为使用所述光接收信号来计算椭圆方位角，偏振度和偏振分量强度中的至少一个，并且确定所述检查对象是否有缺陷 有效的

公开(公告)号：US10298174B2

公开(公告)日：2019-05-21

申请号：US14992492

申请日：2016-01-11

Applicant: Yokogawa Electric Corporation

Inventor： Akishige Ito ,  Masato Ishikawa ,  Takashi Tsubota ,  Yoshinori Matsumoto

IPC: H02S50/15 ,  G01N21/17 ,  H02S50/10

Abstract: A photoelectric conversion element evaluation apparatus includes: a probe light source that irradiates a photoelectric conversion element as the object of measurement with probe light; a pump light source that irradiates the photoelectric conversion element being irradiated with the probe light with pulsed pump light; and a light receiving element that detects time dependency of a change in an amount of the probe light obtained from the photoelectric conversion element.