-
1.Apparatus for working materials by means of a beam of charged particles 失效
Title translation: 用于通过带电粒子束加工材料的装置公开(公告)号:US2944172A
公开(公告)日:1960-07-05
申请号:US83622659
申请日:1959-08-26
Applicant: ZEISS CARL
Inventor: WOLFGANG OPITZ , HELMUT SPRUCK , HEINZ STEIGERWALD KARL
IPC: B23K15/00 , H01J37/09 , H01J37/16 , H01J37/30 , H01J37/301 , H01J37/304
CPC classification number: H01J37/301 , B23K15/0013 , H01J37/09 , H01J37/165 , H01J37/3005 , H01J37/304 , Y10S164/04