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公开(公告)号:US20230275023A1
公开(公告)日:2023-08-31
申请号:US18143170
申请日:2023-05-04
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd
Inventor: Xianming CHEN , Lei FENG , Benxia HUANG , Yejie HONG
IPC: H01L23/532 , H01L23/538 , H01L23/00
CPC classification number: H01L23/53228 , H01L23/5386 , H01L24/14
Abstract: In a method of manufacturing a connector, a first copper pillar layer and a sacrificial copper pillar layer are formed on a temporary bearing plate coated with copper, an etch stop layer is applied on the sacrificial copper pillar layer and electroplated to form a second copper pillar layer, insulating materials is laminated to form a first dielectric layer, a first circuit layer is formed on the first dielectric layer, a second copper pillar layer and a sacrificial copper pillar layer are extended on the first circuit layer, and a sacrificial copper layer is formed on the first circuit layer, insulating material is laminated on the first circuit layer to form a second dielectric layer, the temporary bearing plate is removed, a second and third circuit layers are simultaneously formed on the first and second dielectric layers, and the sacrificial copper layer and the sacrificial copper pillar layer are etched.
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公开(公告)号:US20230127494A1
公开(公告)日:2023-04-27
申请号:US17821725
申请日:2022-08-23
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd.
Inventor: Xianming CHEN , Lei FENG , Benxia HUANG , Yejie HONG , Gao HUANG
IPC: H01L23/498 , H01L23/00 , H01L21/48 , H01L23/13 , H01L23/373 , H01L23/31 , H01L21/56
Abstract: A signal-heat separated TMV packaging structure includes an insulating dielectric material, an inner signal line layer arranged in the insulating dielectric material, an outer signal line layer, a heat dissipation metal face and a chip. A first side of the insulating dielectric material is provided with an isolating layer. The outer signal line layer is arranged on a surface of a second side of the insulating dielectric material and is connected with the inner signal line layer through a TMV structure. The heat dissipation metal face is arranged on a surface of the first side of the insulating dielectric material, and is separated from the inner signal line layer. The chip is embedded in the insulating dielectric material, with an active face in electrically-conductive connection with the inner signal line layer and a passive face in heat transfer connection with the heat dissipation metal face.
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公开(公告)号:US20230010115A1
公开(公告)日:2023-01-12
申请号:US17664417
申请日:2022-05-22
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd.
Inventor: Xianming CHEN , Yejie HONG , Benxia HUANG , Lei FENG
Abstract: A cyclic cooling embedded packaging substrate and a manufacturing method thereof are disclosed. The packaging substrate includes a dielectric material body, a chip, a first metal face, a second metal face and a first trace. The dielectric material body is provided with a packaging cavity, the chip is packaged in the packaging cavity, the first metal face is embedded in the dielectric material body, covers and is connected to a heat dissipation face of the chip. The second metal face is embedded in the dielectric material body, connected to a surface of the first metal face, and is provided with a first cooling channel pattern for forming a cooling channel. The first trace is arranged on a surface of the dielectric material body or embedded therein, and is connected with a corresponding terminal on an active face of the chip through a first conductive structure.
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4.
公开(公告)号:US20240222245A1
公开(公告)日:2024-07-04
申请号:US18455553
申请日:2023-08-24
Applicant: Zhuhai ACCESS Semiconductor Co., LTD.
Inventor: Xianming CHEN , Gao HUANG , Yejie HONG , Wenjian LIN , Benxia HUANG , Zhijun ZHANG
IPC: H01L23/498 , H01L21/48 , H05K1/02 , H05K1/18
CPC classification number: H01L23/49822 , H01L21/4857 , H05K1/0298 , H05K1/182 , H05K2201/10242
Abstract: A method for manufacturing embedded device packaging substrate, a packaging substrate, and a semiconductor are disclosed. The method includes: forming a first circuit layer; laminating a first photosensitive layer onto the first circuit layer; providing an embedded device on the first photosensitive layer, with a pin face of the embedded device facing away from the first photosensitive layer; providing a second photosensitive layer covering the embedded device; partially removing the first dielectric layer such that a minimum thickness of the first dielectric layer covering a side surface of the embedded device is greater than or equal to a preset threshold; providing a second dielectric layer covering the first dielectric layer; and forming, on the second dielectric layer, a second circuit layer that is electrically connected to the first circuit layer and the embedded device.
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公开(公告)号:US20240116752A1
公开(公告)日:2024-04-11
申请号:US18377419
申请日:2023-10-06
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd
Inventor: Xianming CHEN , Lei FENG , Jiangjiang ZHAO , Benxia HUANG , Gao HUANG , Yejie HONG
CPC classification number: B81C1/00301 , B81B7/0061 , B81C1/00309 , B81B2207/092 , B81C2203/0118
Abstract: A packaged cavity structure includes an embedded packaging frame having a first cavity and a first conductive post respectively penetrating an insulation layer in a height direction, a chipset within the first cavity, a first circuit layer on an upper surface of the embedded packaging frame, a first dielectric layer on the first circuit layer, a second circuit layer on the first dielectric layer, a through-hole penetrating the first dielectric layer and the insulation layer, a third circuit layer on a lower surface of the embedded packaging frame, a support post enclosure on the third circuit layer, and a packaging layer formed along the outside of the support post enclosure. A second cavity communicating with the through-hole is formed between the packaging layer and the lower surface of the embedded packaging frame, and the chipset includes a first chip and a second chip provided in a back-to-back stack.
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公开(公告)号:US20230199957A1
公开(公告)日:2023-06-22
申请号:US17906853
申请日:2020-07-24
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd.
Inventor: Xianming CHEN , Lei FENG , Benxia HUANG , Yejie HONG
CPC classification number: H05K1/115 , H05K3/0047 , H05K3/0076 , H05K3/188 , H05K3/4658 , H05K2201/096 , H05K2201/09545 , H05K2203/061 , H05K2203/0723 , H05K2203/167
Abstract: A multilayer substrate and a manufacturing method thereof are disclosed. The multilayer substrate includes two or more dielectric layers laminated in sequence; a public line disposed at a top or bottom dielectric layer of the two or more dielectric layers; and two or more first through hole pillars respectively each embedded in a respective one of the dielectric layers, and the first through hole pillars are connected in cascade and then connected with the public line.
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7.
公开(公告)号:US20230197739A1
公开(公告)日:2023-06-22
申请号:US17998159
申请日:2020-07-24
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd.
Inventor: Xianming CHEN , Lei FENG , Weiyuan YANG , Benxia HUANG , Yejie HONG
IPC: H01L27/13
Abstract: A capacitor and inductor embedded structure and a manufacturing method therefor, and a substrate are disclosed. The method includes: providing a metal plate; sequentially depositing and etching a first protective layer, a thin film dielectric layer, a second protective layer, and an upper electrode layer on an upper surface of the metal plate to form a thin film capacitor and a capacitor upper electrode; pressing an upper dielectric layer to the upper surface of the metal plate, covering the thin film capacitor and the capacitor upper electrode, and etching the metal plate to form a capacitor lower electrode; pressing a lower dielectric layer to a lower surface of the metal plate, and performing drilling on the upper dielectric layer and the lower dielectric layer to form inductor through holes and capacitor electrode through holes; electroplating metal to form an inductor and circuit layers.
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公开(公告)号:US20230051730A1
公开(公告)日:2023-02-16
申请号:US17976228
申请日:2022-10-28
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd
Inventor: Xianming CHEN , Yejie HONG , Benxia HUANG , Lei FENG
IPC: H01L23/538 , H01L21/50 , H01L21/768 , H01L23/15 , H01L23/00
Abstract: A package substrate includes: a glass frame having a through hole and a chip embedding cavity; an electronic component arranged in the chip embedding cavity; a dielectric layer filled on an upper surface of the glass frame and in the chip embedding cavity; a metal pillar passing through the through hole; a circuit layer arranged on the upper surface and/or a lower surface of the glass frame and connected to the electronic component and the metal pillar; and a solder mask arranged on a surface of the circuit layer and having a pad which is connected to the circuit layer.
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公开(公告)号:US20240194578A1
公开(公告)日:2024-06-13
申请号:US18377442
申请日:2023-10-06
Applicant: Zhuhai ACCESS Semiconductor Co., Ltd
Inventor: Xianming CHEN , Yejie HONG , Gao HUANG , Benxia HUANG , Wenjian LIN
IPC: H01L23/498 , H01L21/48 , H01L23/31
CPC classification number: H01L23/49838 , H01L21/4853 , H01L23/3121 , H01L23/49822 , H01L23/49833
Abstract: An embedded device package substrate includes a line board including a first insulating layer and a first line layer located on an upper surface of the first insulating layer, a core layer covering the first line layer and including a preset opening, a device embedded in the preset opening, a packaging layer covering the core layer and filling the gap between the core layer and the device, and an outer line layer located on the packaging layer. The outer line layer is connected to a terminal of the device by a first conductive column penetrating through the packaging layer and to the first line layer by a second conductive column penetrating through the core layer and the packaging layer.
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公开(公告)号:US20240153819A1
公开(公告)日:2024-05-09
申请号:US18454022
申请日:2023-08-22
Applicant: Zhuhai ACCESS Semiconductor Co., LTD.
Inventor: Xianming CHEN , Gao HUANG , Wenjian LIN , Yejie HONG , Benxia HUANG , Juchen HUANG
IPC: H01L21/768 , H01L21/48 , H01L23/13 , H01L23/14
CPC classification number: H01L21/76885 , H01L21/4828 , H01L23/13 , H01L23/14
Abstract: A substrate manufacturing method, an embedded substrate and a semiconductor are disclosed. The method includes: manufacturing a first semi-finished substrate including first circuit layers and a first dielectric layer arranged in staggered and laminated manner; arranging a viscous material layer on the first circuit layer to form a device adhering area; adhering an embedded device on the device adhering area, a pin face of the embedded device facing away from the viscous material layer; laminating a second dielectric layer on the first circuit layer, which covers the viscous material layer and the embedded device; manufacturing a first conductive pillar, a second conductive pillar and a second circuit layer, the first conductive pillar extending through the second dielectric layer and configured for connecting the second circuit layer with the first circuit layer, the second conductive pillar being configured for connecting the embedded device with the second circuit layer.
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