公开(公告)号：US20250069845A1

公开(公告)日：2025-02-27

申请号：US18456246

申请日：2023-08-25

Applicant: c/o FEI Company

Inventor： Neel Leslie ,  James Vickers

IPC: H01J37/244 ,  H01J37/04 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28

Abstract: Systems, components, methods, and algorithms for generating difference data are described. A computer-implemented method includes directing a first pulse of charged particles toward a sample. The method can include generating first detector data based at least in part on interactions between the charged particles of the first pulse and the sample. The method can include directing a second pulse of charged particles toward the sample. The method can include generating second detector data based at least in part on interactions between the charged particles of the second pulse and the sample. The method can also include generating difference data using the first detector data and the second detector data, wherein the difference data describe a change between an “on” state of the sample and an “off” state of the sample.