公开(公告)号：US09737901B2

公开(公告)日：2017-08-22

申请号：US14209972

申请日：2014-03-13

Applicant: els System Technology Co., Ltd.

Inventor： Chih-Ming Teng

IPC: B05B7/04 ,  H01L21/67 ,  B08B3/02 ,  B08B5/02 ,  B05B7/08

CPC classification number: B05B7/0483 ,  B05B7/0884 ,  B08B3/024 ,  B08B5/02 ,  H01L21/67051

Abstract: A fluid nozzle device includes: at least one fluid nozzle which includes a nozzle body having a first inner surface, a second inner surface that is opposite to and spaced apart from the first inner surface, an inner bottom surface that interconnects the first and second inner surfaces and that cooperates with the first and second inner surfaces to define a receiving space thereamong; a gas-intake tube disposed on top of the nozzle body; a liquid-intake tube formed with a liquid inlet and having at least one liquid outlet that is distal from the gas-intake tube; and a plurality of ejecting channels spaced apart from each other and disposed in the nozzle body.

公开(公告)号：US20150013727A1

公开(公告)日：2015-01-15

申请号：US14209972

申请日：2014-03-13

Applicant: els System Technology Co., Ltd.

Inventor： Chih-Ming Teng

IPC: B08B3/02 ,  B05B7/04 ,  B05B7/08

CPC classification number: B05B7/0483 ,  B05B7/0884 ,  B08B3/024 ,  B08B5/02 ,  H01L21/67051

Abstract: A fluid nozzle device includes: at least one fluid nozzle which includes a nozzle body having a first inner surface, a second inner surface that is opposite to and spaced apart from the first inner surface, an inner bottom surface that interconnects the first and second inner surfaces and that cooperates with the first and second inner surfaces to define a receiving space thereamong; a gas-intake tube disposed on top of the nozzle body; a liquid-intake tube formed with a liquid inlet and having at least one liquid outlet that is distal from the gas-intake tube; and a plurality of ejecting channels spaced apart from each other and disposed in the nozzle body.

Abstract translation: 流体喷嘴装置包括：至少一个流体喷嘴，其包括具有第一内表面的喷嘴主体，与第一内表面相对并与第一内表面间隔开的第二内表面，内底表面，其将第一和第二内表面 并且与第一和第二内表面配合以限定其中的接收空间; 设置在所述喷嘴体的上方的吸气管; 液体进入管，其形成有液体入口并且具有至少一个远离进气管的液体出口; 以及多个排出通道，彼此间隔开并设置在喷嘴体中。