公开(公告)号：US20050194650A1

公开(公告)日：2005-09-08

申请号：US10793877

申请日：2004-03-08

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。