公开(公告)号：US20020153495A1

公开(公告)日：2002-10-24

申请号：US10131805

申请日：2002-04-22

Applicant: Nikon Corporation.

Inventor： Motofusa Kageyama

IPC: H01J037/07

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/02 ,  H01J2237/0264 ,  H01J2237/31793

Abstract: Magnetically shielded enclosures are provided that house charged-particle-beam (CPB) systems (e.g., CPB microlithography apparatus) having active-canceler coils. The enclosures have outer walls comprised of anisotropic magnetic materials or of magnetically divided plates. The magnetically divided plates may be made of Permalloy or other similar material. The anisotropic or magnetically divided outer walls may be configured to align the external magnetic field in the direction of the magnetic field produced by the active canceler. Thus, controlling the electrical current in the active-canceler coils to cancel the external magnetic field is simplified, even if the CPB microlithography apparatus has a complex shape or is in an environment with a non-uniform magnetic field.

Abstract translation: 提供了具有带有主动消除线圈的带电粒子束（CPB）系统（例如CPB微光刻设备）的磁屏蔽外壳。 外壳具有由各向异性磁性材料或磁性分隔板组成的外壁。 磁分离板可以由坡莫合金或其它类似材料制成。 各向异性或磁分割的外壁可以被配置为使外部磁场沿着由有效消除器产生的磁场的方向对准。 因此，即使CPB微光刻设备具有复杂形状或处于具有不均匀磁场的环境中，也能够简化控制主动加速器线圈中的电流以抵消外部磁场。